Monolayer transition metal dichalcogenide transistors can be fabricated on 300 mm wafers using an approach that is compatible with back-end-of-line process temperatures.
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Xiang, D., Liu, T. Monolayer transistors at wafer scales. Nat Electron 4, 868–869 (2021). https://doi.org/10.1038/s41928-021-00694-7
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DOI: https://doi.org/10.1038/s41928-021-00694-7
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