Gate dielectrics with an equivalent oxide thickness of only one nanometre can be grown on two-dimensional semiconductors with the help of a monolayer molecular crystal.
References
Fiori, G. et al. Nat. Nanotechnol. 9, 768–779 (2014).
Lee, C.-S. et al. Proc. 2016 IEEE Int. Electron Devices Meeting. 28.3.1–28.3.4 (IEEE, 2016).
Zhang, X.-Y. et al. Appl. Sci. 7, 1244 (2017).
Li, W. et al. Nat. Electron. https://doi.org/10.1038/s41928-019-0334-y (2019).
Wang, X., Tabakman, S. M. & Dai, H. J. Am. Chem. Soc. 130, 8152–8153 (2008).
Yu, Z. et al. Adv. Mater. 28, 547–552 (2016).
Park, J. H. et al. ACS Nano 10, 6888–6896 (2016).
Dean, C. R. et al. Nat. Nanotechnol. 5, 722–726 (2010).
Hersam, M. C. & Wang, Q. H. Nat. Chem. 1, 206–211 (2009).
Illarionov, Y. Y. et al. Nat. Electron. 2, 230–235 (2019).
Author information
Authors and Affiliations
Corresponding authors
Rights and permissions
About this article
Cite this article
Xie, Z., Liu, Y. & Liao, L. Ultrathin dielectrics for 2D devices. Nat Electron 2, 559–560 (2019). https://doi.org/10.1038/s41928-019-0344-9
Published:
Issue Date:
DOI: https://doi.org/10.1038/s41928-019-0344-9
- Springer Nature Limited