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Adaptive imaging

MEMS deformable mirrors

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Microelectromechanical systems (MEMS) technology has allowed the realization of cost-effective, high-performance deformable mirrors for adaptive-optics-enhanced imaging.

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Figure 1: Design of MEMS DMs.

BOSTONMICROMACHINES

Figure 2: BMC's 4,092-actuator MEMS DM for the Gemini Planet Imager.

BOSTONMICROMACHINES

Figure 3

BOSTONMICROMACHINES

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  1. Thomas Bifano is Chief Technical Officer at Boston Micromachines Corporation, 30 Spinelli Place, Cambridge 01238, Massachusetts, USA. tgb@bostonmicromachines.com,

    Thomas Bifano

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  1. Thomas Bifano
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Bifano, T. MEMS deformable mirrors. Nature Photon 5, 21–23 (2011). https://doi.org/10.1038/nphoton.2010.297

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