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Surfaces feel the heat

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Thermochemical lithography is able to produce features just 28 nanometres wide on polymer surfaces.

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Figure 1: Artist's impression of thermochemical lithography.

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Authors and Affiliations

  1. Amar S. Basu is in the Department of Electrical and Computer Engineering, Wayne State University, Detroit, Michigan 48202, USA. abasu@eng.wayne.edu,

    Amar S. Basu

  2. Yogesh B. Gianchandani is in the Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, Michigan 48109, USA. yogesh@umich.edu,

    Yogesh B. Gianchandani

Authors
  1. Amar S. Basu
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  2. Yogesh B. Gianchandani
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Basu, A., Gianchandani, Y. Surfaces feel the heat. Nature Nanotech 4, 622–623 (2009). https://doi.org/10.1038/nnano.2009.287

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