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Mechanisms of sputtering

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Authors and Affiliations

  1. School of Mathematical and Physical Sciences, University of Sussex, Falmer, Brighton, UK

    M. W. THOMPSON

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  1. M. W. THOMPSON
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THOMPSON, M. Mechanisms of sputtering. Nature 277, 326–327 (1979). https://doi.org/10.1038/277326c0

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