Abstract
It is well known that the Schwoebel–Ehrlich barrier affects, and even dictates, surface microstructure evolution – such as the transition of growth modes from layer-by-layer to island growth. The conventional Schwoebel–Ehrlich barrier refers to the case when an adatom diffuses down an island of one monolayer. During thin film deposition, an adatom often needs to diffuse down an island of multiple layers. For the latter, we demonstrate and calculate the corresponding Schwoebel–Ehrlich barrier – which we call three-dimensional Schwoebel–Ehrlich barrier. Our calculations show that the three-dimensional Schwoebel–Ehrlich barrier can be large even if its conventional counterpart is small – as in aluminum. We further propose and demonstrate a possible process of engineering surface faceting and film texture, by modifying the three-dimensional Schwoebel–Ehrlich barrier.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Vaidya, S. and Sinha, A.K., Thin Solid Film, 75 (1981) 523.
Greene, J., Sundgren, J., Hultman, L., Petrov, L., and Bergstrom, D., Appl. Phys. Lett., 67 (1995) 2928.
Onoda, H., Kageyama, M., and Hashimoto, K., J. Appl. Phys., 77 (1995) 885.
Schwoebel, R.L. and Shipsey, E.J., J. Appl. Phys., 37 (1966) 3682.
Ehrlich, G. and Hudda, F.G., J. Chem. Phys., 44 (1966) 1039.
Ehrlich, G., Surf. Sci., 299/300 (1994) 628.
Gölzhäuser, A. and Ehrlich, G., Phys. Rev. Lett., 77 (1996) 1334.
Wang, S.C. and Ehrlich, G., Phys. Rev. Lett., 79 (1997) 4234.
Kyuno, K. and Ehrlich, G., Phys. Rev. Lett., 84 (2000) 2658.
Zhang, Z. and Lagally, M.G., Phys. Rev. Lett., 72 (1994) 693.
Zhang, Z. and Lagally, M.G., Science, 276 (1997) 377.
Kandel, D., Phys. Rev. Lett., 78 (1997) 499.
Kandel, D. and Kaxiras, E., Phys. Rev. Lett., 75 (1995) 2742.
Esch, S., Hohage, M., Michely, T., and Comsa, G., Phys. Rev. Lett., 72 (1994) 518.
van der Vegt, H.A., Breeman, M., Ferrer, S., Etgens, V.H., Torrelles, X., Fajardo, P., and Vlieg, E., Phys. Rev., B51 (1995) 14806.
Jacobsen, J., Jacobsen, K.W., Stoltze, P., and Nø rskov, K., Phys. Rev. Lett., 74 (1995) 2295.
Kodiyalam, S., Khor, K.E., and Sarma, S.D., Phys. Rev., B53 (1996) 9913.
Feibelman, P.J., Phys. Rev. Lett., 81 (1998) 168.
Kurpick, U. and Rahman, T.S., Phys. Rev., B57 (1998) 2482.
Ramana Murty, M.V. and Cooper, B.H., Phys. Rev. Lett., 83 (1999) 352.
Rottler, J. and Maass, P., Phys. Rev. Lett., 83 (1999) 3490.
Schinzer, S., Koehler, S., and Reents, G., Euro. Phys. J., B15 (2000) 161.
Stumpf, R. and Scheffler, M., Phys. Rev. Lett., 72 (1994) 254.
Stumpf, R. and Scheffler, M., Phys. Rev., B53 (1996) 4958.
Bogicevic, A., Stroemquist, J., and Lundqvist, B.I., Phys. Rev. Lett., 81 (1998) 637.
Bockstedte, M., Liu, S.J., Pankratov, O., Woo, C.H., and Huang, H., Comp. Mater. Sci. (2001) in press.
Baumann, F.H., Chopp, D.L., Diaz de la Rubia, T., Gilmer, T.H., Greene, J.E., Huang, H., Kodambaka, S., O'Sullivan, P., and Petrov, I., MRS Bulletin, 26 (2001) 182.
Huang, H., Gilmer, G.J., and Diaz de la Rubia, T., J. Appl. Phys., 84 (1998) 3636.
Huang, H. and Gilmer, G.H., J. Comp. Aid. Mat. Des., 6 (1999) 117.
Gilmer, G.H., Huang, H., Diaz de la Rubia, T., and Roland, C., Comp. Mater. Sci., 12 (1998) 354.
Gilmer, G.H., Huang, H., Diaz de la Rubia, T., Torre, J.D., and Barumann, F., Thin Solid Films, 365 (1999) 189.
Huang, H. and Gilmer, G.H., Comp. Mater. Sci. (2001) in press.
Huang, H. and Gilmer, G.H., J. Comp. Aid. Mat. Des. 7 (2001) 203.
Voter, A.F., Phys. Rev., B34 (1986) 6819.
Liu, S.J., Wang, E.G., Woo, C.H., and Huang, H., Adv. Plasma Sci., 3 (2001) 125.
Hsiung, L., private communication.
Rights and permissions
About this article
Cite this article
Liu, S., Wang, E., Woo, C. et al. Three-dimensional Schwoebel–Ehrlich barrier. Journal of Computer-Aided Materials Design 7, 195–201 (2000). https://doi.org/10.1023/A:1011832828818
Issue Date:
DOI: https://doi.org/10.1023/A:1011832828818