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Preparation and characterization of platinum black electrodes

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Abstract

We have investigated properties of electrochemically deposited platinum black by atomic force and scanningelectron microscopy. Platinum black was deposited on evaporated platinum electrods. Deposition time and cure temperature was found to influence the quality and morphology of the platinum black layer. Morphological inclusions were readily observed in filmsdeposited for duration of less than 60 seconds at a bias of 1.5 V against a platinum counter electrode. Shorting of themicrofabricated electrodes due to lateral outgrowth of high surfacearea platinum black was observed when current densities on the orderof 100 mA cm−2 were employed. We further show that reproducibility ofhighly adherent platinized electrodes is achieved.

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Authors and Affiliations

  1. Microfabrication Application Laboratories, University of Illinois, Chicago, USA

    B. Ilic

  2. Microfabrication Application Laboratories, University of Illinois, Chicago, USA

    D. Czaplewski, T. Stanczyk & G. J. Maclay

  3. Institute of Microelectronics, 11 Science Park Road, Singapore, 117685

    P. Neuzil

  4. Department of Civil and Materials Engineering, University of Illinois, Chicago, USA

    J. Blough

Authors
  1. B. Ilic
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  2. D. Czaplewski
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  3. P. Neuzil
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  4. T. Stanczyk
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  5. J. Blough
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  6. G. J. Maclay
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Ilic, B., Czaplewski, D., Neuzil, P. et al. Preparation and characterization of platinum black electrodes. Journal of Materials Science 35, 3447–3457 (2000). https://doi.org/10.1023/A:1004884723515

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