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Development of the SC-RTA Process for Fabrication of Sol-Gel Based Silica-on-Silicon Integrated Optic Components

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Abstract

The SC-RTA process for fabricating silica-on-silicon PLCs from sol-gel glass is described. A wide range of glasses has been deposited, process temperatures have been reduced, and components fabricated by reactive ion etching, reflow and burial of channel guides have shown steadily decreasing loss. Propagation losses are ≈0.2 dB/cm at λ = 1.523 μm in a high Δn system. Passive components demonstrated include tree-structured power splitters and thermo-optic switches.

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Authors and Affiliations

  1. Optical and Semiconductor Devices Section, Dept. of Electrical and Electronic Engineering, Imperial College, Exhibition Road, London, SW7 2BT, UK

    R.R.A. Syms, A.S. Holmes, W. Huang, V.M. Schneider & M. Green

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  1. R.R.A. Syms
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  2. A.S. Holmes
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  3. W. Huang
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  4. V.M. Schneider
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  5. M. Green
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Syms, R., Holmes, A., Huang, W. et al. Development of the SC-RTA Process for Fabrication of Sol-Gel Based Silica-on-Silicon Integrated Optic Components. Journal of Sol-Gel Science and Technology 13, 509–516 (1998). https://doi.org/10.1023/A:1008606220011

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