Abstract
Precise control and knowledge of surface structures are essential inorder to meet the requirements of today's and future materials. One possiblegrowth technique capable of meeting the requirements is atomic layer epitaxy(ALE). ALE is based on sequentially applied saturated gas-solid reactions,which provide the means for adsorption controlled material deposition atatomic layer level. In this paper the potentiality of the use of porousmaterials in a detailed study of adsorption controlled growth is discussed.At the same time the study promotes the application of adsorption controlledmaterials processing for advanced catalysts manufacturing.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
T. Suntola, Atomic Layer Epitaxy, Materials Science Reports 4 261 (1989).
T. Suntola, Atomic Layer Epitaxy, Handbook of Crystal Growth 3, Thin Films and Epitaxy, Part B: Growth Mechanisms and Dynamics(Elsevier, 1994), Chapt. 14.
E.-L. Lakomaa, Appl. Surf. Sci. 75, 185 (1994).
S. Haukka, A. Kytökivi, E.-L. Lakomaa, U. Lehtovirta, M. Lindblad, V. Lujala, and T. Suntola, Studies in Surface Science and Catalysis, edited by B. Delmon and J.T. Yates (Elsevier Science B.V., Amsterdam, 1995), Vol. 91, p. 957.
S. Haukka, E.-L. Lakomaa, and A. Root, J. Phys. Chem. 97, 5085 (1993).
S. Haukka and A. Root, J. Phys. Chem. 98, 1695 (1994).
A. Kytökivi, M. Lindblad, and A. Root, J. Chem. Soc. Faraday Trans. 91, 941 (1995).
S. Haukka, M. Lindblad, and T. Suntola, Appl. Surf. Sci. 112, 23 (1997).
S. Haukka, A. Kytökivi, and A. Rautiainen (to be published).
M. Lindblad, S. Haukka, A. Kytökivi, E.-L. Lakomaa, A. Rautiainen, and T. Suntola, Appl. Surf. Sci. (in press).
M. Lindblad, L.P. Lindfors, and T. Suntola, Catal. Lett. 27, 323 (1994).
T. Suntola, Appl. Surf. Sci. 100/101, 391 (1996).
S. Haukka, E.-L. Lakomaa, and T. Suntola, Appl. Surf. Sci. 75, 220 (1994).
E.-L. Lakomaa, S. Haukka, and T. Suntola, Appl. Surf. Sci. 60/61, 742 (1992).
S. Haukka, E.-L. Lakomaa, and T. Suntola, Thin Solid Films 225, 280 (1992).
S. Haukka, E.-L. Lakomaa, O. Jylhä, J. Vilhunen, and S. Hornytzkyj, Langmuir 9, 3497 (1993).
A. Kytökivi, E.-L. Lakomaa, and A. Root, Langmuir 12, 4395 (1996).
A. Kytökivi, E.-L. Lakomaa, A. Root, H. Österholm, J.-P. Jacobs, and H.H. Brongersma, Langmuir 13, 2717 (1997).
A. Kytökivi and S. Haukka, J. Phys. Chem. (submitted).
A. Kytökivi, J.-P. Jacobs, A. Hakuli, J. Meriläinen, and H.H. Brongersma, J. Catal. 162, 190 (1996).
J.-P. Jacobs, J.G.H. Reintjes, H.H. Brongersma, L.P. Lindfors, and J. Jylhä, Catal. Lett. 25, 315 (1994).
H.H. Brongersma, P.A.C. Groenen, and J.-P. Jacobs, in Science of Ceramic Interfaces II, edited by J. Nowotny, Mat. Sci. Monographs (Elsevier Science, Amsterdam, 1994), Vol. 81, p. 113.
A.A. Tsyganenko and V.N. Filimonov, Spectrosc. Lett. 5, 477(1972).
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Haukka, S., Suntola, T. Advanced Materials Processing by Adsorption Control. Interface Science 5, 119–128 (1997). https://doi.org/10.1023/A:1008601024870
Issue Date:
DOI: https://doi.org/10.1023/A:1008601024870