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A new method for measuring laser beam straightness error based on common-path compensation

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Abstract

A novel method for laser beam straightness error measurements based on common-path compensation is proposed. The basic principle of the method is described and the math-model is established. Furthermore, the influence of laser beam drift on straightness error measurements is analyzed. The experimental results show that the measurement accuracy can be greatly improved by using the common-path compensation for laser beam drift.

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Authors and Affiliations

  1. Key Laboratory of Luminescence and Optical Information of Ministry of Education, Beijing Jiaotong University, Beijing, 100044, China

    Feng-ling You  (由风玲), Qi-bo Feng  (冯其波), Bin Zhang  (张斌), Yu-sheng Zhai  (翟玉生), Rui Cao  (曹睿) & Heng-chu Fang  (方恒楚)

Authors
  1. Feng-ling You  (由风玲)
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  2. Qi-bo Feng  (冯其波)
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  3. Bin Zhang  (张斌)
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  4. Yu-sheng Zhai  (翟玉生)
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  5. Rui Cao  (曹睿)
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  6. Heng-chu Fang  (方恒楚)
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Corresponding author

Correspondence to Qi-bo Feng  (冯其波).

Additional information

This work has been supported by the National Natural Science Foundation of China (No. 50675017).

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You, Fl., Feng, Qb., Zhang, B. et al. A new method for measuring laser beam straightness error based on common-path compensation. Optoelectron. Lett. 5, 383–386 (2009). https://doi.org/10.1007/s11801-009-9013-y

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  • DOI: https://doi.org/10.1007/s11801-009-9013-y

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