Abstract
To realize a surface plasmon resonance-enhanced zinc oxide (ZnO) ultraviolet photodetector based on a sub-wavelength metal grating, we take advantage of the sensitivity of the resonance condition of a sub-wavelength metal grating to the refractive index of the surrounding medium. We theoretically design a sub-wavelength Ag grating covered with a high-refractive-index medium layer and apply it to a ZnO ultraviolet photodetector. By optimizing the parameters (angle of incidence, grating period, grating spacing, grating thickness, high-refractive-index medium layer thickness, refractive index of the covering), the optical field is localized at the interface of the sub-wavelength Ag grating and the ZnO thin film; that is, surface plasmon resonance is realized within the device. Compared with the device without a high-refractive-index medium layer, the maximum absorption enhancement factor of the designed device can reach up to 108. This work will provide theoretical guidance to realize a surface plasmon resonance-enhanced ZnO ultraviolet photodetector with a sub-wavelength metal grating.
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Acknowledgments
This work is supported by the National Natural Science Foundation of China (no. 11804235) and the Major Incubation Project of Shenyang Normal University (51700303). We thank Liwen Bianji, Edanz Group China (www.liwenbianji.cn/ac), for editing the English text of a draft of this manuscript.
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Yu, J., Men, HJ., Zhang, JW. et al. Design of a Surface Plasmon Resonance-Enhanced ZnO Ultraviolet Photodetector Based on a Sub-wavelength Metal Grating Covered with a High-Refractive-Index Medium. J. Electron. Mater. 49, 4469–4473 (2020). https://doi.org/10.1007/s11664-020-08003-2
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DOI: https://doi.org/10.1007/s11664-020-08003-2