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Electron-Induced Secondary Electron Emission Properties of MgO/Au Composite Thin Film Prepared by Magnetron Sputtering

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Abstract

As a type of electron-induced secondary electron emitter, MgO/Au composite thin film was prepared by reactive magnetron sputtering of individual Mg target and Au target, and the effects of key process parameters on its surface morphology and secondary electron emission (SEE) properties were investigated. It is found that to deposit a NiO buffer layer on the substrate is conducive to the subsequent growth of MgO grains owing to the lattice matching. The gold addition can raise the electrical conductivity of MgO film and further suppress the surface charging. However, the gold deposition would interfere with the MgO crystallization and increase the surface roughness of MgO/Au film. Therefore, MgO/Au composite thin film with a NiO buffer layer and proper deposition times of MgO and Au can achieve superior SEE properties due to good MgO crystallization, low surface roughness and reasonable electrical conductivity. The optimized MgO/Au composite thin film has a higher SEE coefficient and a lower 1-h SEE degradation rate under electron beam bombardment in comparison with MgO film.

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Acknowledgements

This work was supported by the National Natural Science Foundation of China under Grant Nos. 61275023, 51271140 and U1537210.

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Authors and Affiliations

  1. Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Xi’an Jiaotong University, No. 28, Xianning West Road, Xi’an, 710049, China

    Jie Li, Wenbo Hu, Qiang Wei, Shengli Wu, Xing Hua & Jintao Zhang

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  1. Jie Li
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  2. Wenbo Hu
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  3. Qiang Wei
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  4. Shengli Wu
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  5. Xing Hua
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Correspondence to Wenbo Hu.

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Li, J., Hu, W., Wei, Q. et al. Electron-Induced Secondary Electron Emission Properties of MgO/Au Composite Thin Film Prepared by Magnetron Sputtering. J. Electron. Mater. 46, 1466–1475 (2017). https://doi.org/10.1007/s11664-016-5178-x

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  • DOI: https://doi.org/10.1007/s11664-016-5178-x

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