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Monte Carlo Simulations of Thermal Conductivity in Nanoporous Si Membranes

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Abstract

We present a Monte Carlo study of heat transport in Si nanomeshes. Phonons are treated semiclassically as particles of specific energy and velocity that undergo phonon–phonon scattering and boundary scattering on the surfaces of the nanomesh pores. We investigate the influence of: (1) geometric parameters such as the pore arrangement/randomness and porosity, and (2) the roughness amplitude of the pore surfaces on the thermal conductivity of the nanomeshes. We show that the nanomesh porosity has a strong detrimental influence on the thermal conductivity. Boundary roughness still degrades the thermal conductivity, but its influence is smaller.

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Acknowledgements

This work has been supported by the Austrian Science Fund (FWF) contract P25368-N30. The authors acknowledge helpful discussions with Dr.␣Hossein Karamitaheri.

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Authors and Affiliations

  1. Institute for Microelectronics, Technical University of Vienna, Vienna, Austria

    Stefanie Wolf, Neophytos Neophytou, Zlatan Stanojevic & Hans Kosina

  2. School of Engineering, University of Warwick, Coventry, CV4 7AL, UK

    Neophytos Neophytou

Authors
  1. Stefanie Wolf
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  2. Neophytos Neophytou
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  3. Zlatan Stanojevic
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  4. Hans Kosina
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Correspondence to Stefanie Wolf.

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Wolf, S., Neophytou, N., Stanojevic, Z. et al. Monte Carlo Simulations of Thermal Conductivity in Nanoporous Si Membranes. J. Electron. Mater. 43, 3870–3875 (2014). https://doi.org/10.1007/s11664-014-3324-x

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  • DOI: https://doi.org/10.1007/s11664-014-3324-x

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