Skip to main content
SpringerLink
Log in

Micromachining soda-lime glass by femtosecond laser pulses

  • Research Article
  • Published:
Frontiers of Physics Aims and scope Submit manuscript

Abstract

The physical process of forming a modified region in soda-lime glass was investigated using 1 kHz intense femtosecond laser pulses from a Ti: sapphire laser at 775 nm. Through the modifications induced by the femtosecond laser radiation using selective chemical etching techniques, we fabricated reproducible and defined microstructures and further studied their morphologies and etching properties. Moreover, a possible physical mechanism for the femtosecond laser modification in soda-lime glass was proposed.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. Z. N. Peng, W. Jia, and Q. Y. Wang, Micromachining in glass with femtosecond laser, Nanotech. Precis. Eng. 6(2), 114 (2008)

    Google Scholar 

  2. K. Miura, J. R. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, Photowritten optical waveguides in various glasses with ultrashort pulse laser, Appl. Phys. Lett. 71(23), 3329 (1997)

    Article  ADS  Google Scholar 

  3. R. R. Gattass and E. Mazur, Femtosecond laser micromachining in transparent materials, Nat. Photonics 2(4), 219 (2008)

    Article  ADS  Google Scholar 

  4. K. Sugioka and Y. Cheng, Ultrafast lasers — reliable tools for advanced materials processing, Light Sci. Appl. 3(4), e149 (2014)

    Article  Google Scholar 

  5. C. Hnatovsky, R. S. Taylor, E. Simova, P. P. Rajeev, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, Fabrication of microchannels in glass using focused femtosecond laser radiation and selective chemical etching, Appl. Phys. A 84(1–2), 47 (2006)

    Article  ADS  Google Scholar 

  6. K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, and K. Hirao, Photowritten optical waveguides in various glasses with ultrashort pulse laser, Appl. Phys. Lett. 71(23), 3329 (1997)

    Article  ADS  Google Scholar 

  7. C. B. Schaffer, A. Brodeur, J. F. García, and E. Mazur, Micromachining bulk glass by use of femtosecond laser pulses with nanojoule energy, Opt. Lett. 26(2), 93 (2001)

    Article  ADS  Google Scholar 

  8. C. B. Schaffer, J. F. García, and E. Mazur, Bulk heating of transparent materials using a high-repetition-rate femtosecond laser, Appl. Phys. A 76(3), 351 (2003)

    Article  ADS  Google Scholar 

  9. A. Saliminia, N. T. Nguyen, S. L. Chin, and R. Vallée, Densification of silica glass induced by 0.8 and 1.5 µm intense femtosecond laser pulses, J. Appl. Phys. 99(9), 093104 (2006)

    Article  ADS  MATH  Google Scholar 

  10. A. Marcinkevičius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, and J. Nishii, Femtosecond laserassisted three-dimensional microfabrication in silica, Opt. Lett. 26(5), 277 (2001)

    Article  ADS  Google Scholar 

  11. R. S. Taylor, C. Hnatovsky, E. Simova, D. M. Rayner, V. R. Bhardwaj, and P. B. Corkum, Femtosecond laser fabrication of nanostructures in silica glass, Opt. Lett. 28(12), 1043 (2003)

    Article  ADS  Google Scholar 

  12. R. Taylor, C. Hnatovsky, E. Simova, D. Rayner, M. Mehandale, V. Bhardwaj, and P. Corkum, Ultra-high resolution index of refraction profiles of femtosecond laser modified silica structures, Opt. Express 11(7), 775 (2003)

    Article  ADS  Google Scholar 

  13. J. W. Chan, T. R. Huser, S. H. Risbud, J. S. Hayden, and D. M. Krol, Waveguide fabrication in phosphate glasses using femtosecond laser pulses, Appl. Phys. Lett. 82(15), 2371 (2003)

    Article  ADS  Google Scholar 

  14. W. Reichman, C. A. Click, and D. M. Krol, C. A. Click, and D. M. Krol, Femtosecond laser writing of waveguide structures in sodium calcium silicate glasses, Proc. SPIE 5714, 238 (2005)

    Article  ADS  Google Scholar 

  15. F. Vega, J. Armengol, V. Diez-Blanco, J. Siegel, J. Solis, B. Barcones, A. Pérez-Rodríguez, and P. Loza-Alvarez, Mechanisms of refractive index modification during femtosecond laser writing of waveguides in alkaline lead-oxide silicate glass, Appl. Phys. Lett. 87(2), 021109 (2005)

    Article  ADS  Google Scholar 

  16. V. R. Bhardwaj, E. Simova, P. P. Rajeev, C. Hnatovsky, R. S. Taylor, D. M. Rayner, and P. B. Corkum, Optically produced arrays of planar nanostructures inside fused silica, Phys. Rev. Lett. 96(5), 057404 (2006)

    Article  ADS  Google Scholar 

  17. Y. Liao, B. Zeng, L. Qiao, L. Liu, K. Sugioka, and Y. Cheng, Threshold effect in femtosecond laser induced nanograting formation in glass: Influence of the pulse duration, Appl. Phys. A 114(1), 223 (2014)

    Article  ADS  Google Scholar 

  18. A. Saliminia, N. T. Nguyen, M. C. Nadeau, S. Petit, S. L. Chin, and R. Vallée, Writing optical waveguides in fused silica using 1 kHz femtosecond infrared pulses, J. Appl. Phys. 93(7), 3724 (2003)

    Article  ADS  Google Scholar 

  19. V. R. Bhardwaj, P. B. Corkum, D. M. Rayner, C. Hnatovsky, E. Simova, and R. S. Taylor, Stress in femtosecond-laser-written waveguides in fused silica, Opt. Lett. 29(12), 1312 (2004)

    Article  ADS  Google Scholar 

  20. E. N. Glezer, M. Milosavljevic, L. Huang, R. J. Finlay, T. H. Her, J. P. Callan, and E. Mazur, Three-dimensional optical storage inside transparent materials, Opt. Lett. 21(24), 2023 (1996)

    Article  ADS  Google Scholar 

  21. B. Henrist, N. Hilleret, M. Jimenez, C. Scheuerlein, M. Taborelli, and G. Vorlaufer, Secondary electron emission data for the simulation of electron cloud, Proceedings ECLOUD 2002, CERN, Geneva, 15–18 April, 2002

    Google Scholar 

  22. Y. Teng, J. Zhou, G. Lin, J. Hua, H. Zeng, S. Zhou, and J. Qiu, Ultrafast modification of elements distribution and local luminescence properties in glass, J. Non-Cryst. Solids 358(9), 1185 (2012)

    Article  Google Scholar 

  23. E. Axinte, Glasses as engineering materials: A review, Mater. Des. 32(4), 1717 (2011)

    Article  Google Scholar 

  24. K. Bourhis, A. Royon, M. Bellec, J. Choi, A. Fargues, M. Treguer, J. Videau, D. Talaga, M. Richardson, T. Cardinal, and L. Canioni, Femtosecond laser structuring and optical properties of a silver and zinc phosphate glass, J. Non-Cryst Solids 356(44), 2658 (2010)

    Article  ADS  Google Scholar 

  25. P. P. Rajeev, M. Gertsvolf, C. Hnatovsky, E. Simova, R. S. Taylor, P. B. Corkum, D. M. Rayner, and V. R. Bhardwaj, Transient nanoplasmonics inside dielectrics, J. Phys. B 40(11), S273 (2007)

    Article  ADS  Google Scholar 

  26. V. Oliveira, S. P. Sharma, P. Herrero, and R. Vilar, Transformations induced in bulk amorphous silica by ultrafast laser direct writing, Opt. Lett. 38(23), 4950 (2013)

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Ultrafast Laser Laboratory, School of Precision Instruments and Opto-Electronics Engineering, Tianjin University, and Key Laboratory of Opto-Electronic Information Technical Science, EMC, Tianjin, 300072, China

    Wei Jia, Lu Chai & Ching-Yue Wang

  2. School of Chemical Engineering and Technology, Tianjin University, Tianjin, 300072, China

    Jian Yu

Authors
  1. Wei Jia
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Jian Yu
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Lu Chai
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Ching-Yue Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Wei Jia.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Jia, W., Yu, J., Chai, L. et al. Micromachining soda-lime glass by femtosecond laser pulses. Front. Phys. 10, 1–4 (2015). https://doi.org/10.1007/s11467-015-0492-y

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11467-015-0492-y

Keywords

Search

Navigation