Abstract
The crack healing rates of polycrystalline silicon microcantilevers in contact with a substrate are measured in n-pentanol vapor at different partial pressures, p/p s. The absolute value of the slope of the logarithmic average crack healing velocity \(\bar{v}\) versus the energy release rate G, \(|d[\log (\bar{v})]/dG|\), is constant and decreases with increasing p/p s. The slope dependence on p/p s is equivalent to that in a water vapor environment. This slope is independent of p/p s in glass stress corrosion cracking experiments due to chemical kinetics, while the present experiments reflect a capillary bridge nucleation mechanism across nanometer-scale gaps created by surface roughness. Equilibrium measurements of adhesion versus p/p s are also compared for n-pentanol and water vapor. For p/p s ≤ 0.5, adhesion is comparable for the two vapors, while for p/p s > 0.5, adhesion in water vapor is approximately twice that in n-pentanol vapor. At lower p/p s, this is explained by the larger Kelvin radius and the larger adsorbed layer thickness of n-pentanol. This combination enables larger asperity gaps to be bridged by capillary liquids. At higher p/p s, adhesion in water vapor is larger because the work of adhesion of capillary bridges becomes twice that of n-pentanol.
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Mate, C.M.: Application of disjoining and capillary pressure to liquid lubricant films in magnetic recording. J. Appl. Phys. 72, 3084 (1992)
Qian, J., Gao, H.: Scaling effects of wet adhesion in biological attachment systems. Acta Biomater. 2, 51–58 (2006)
Mastrangelo, C.H., Hsu, C.H.: Mechanical stability and adhesion of microstructures under capillary forces-part I: basic theory. J. Microelectromech. Syst. 2, 33–43 (1993)
Mastrangelo, C.H., Hsu, C.H.: Mechanical stability and adhesion of microstructures under capillary forces-part ii: experiments. J. Microelectromech. Syst. 2, 44–55 (1993)
Sun, W., Neuzil, P., Kustandi, T.S., Oh, S., Samper, V.D.: The nature of the gecko lizard adhesive force. Biophys. J. 89, L14–L17 (2005)
Asay, D.B., Dugger, M.T., Kim, S.H.: In-situ vapor-phase lubrication of MEMS. Tribol. Lett. 29, 67–74 (2007)
Asay, D.B., Dugger, M.T., Ohlhausen, J.A., Kim, S.H.: Macro- to nanoscale wear prevention via molecular adsorption. Langmuir 24, 155–159 (2008)
Barnette, A.L., Asay, D.B., Ohlhausen, J.A., Dugger, M.T., Kim, S.H.: Tribochemical polymerization of adsorbed n-pentanol on SiO2 during rubbing: when does it occur and is it responsible for effective vapor phase lubrication? Langmuir. 26, 16299–16304 (2010)
Ma, J.: Advanced MEMS Technologies and Displays. Displays (2014)
Lawn, B.: Fracture of Brittle Solids. Cambridge University Press, Cambridge (1993)
Freiman, S.W., Wiederhorn, S.M., Mecholsky Jr, J.J.: Environmentally enhanced fracture of glass: a historical perspective. J. Am. Ceram. Soc. 92, 1371–1382 (2009)
Wan, K., Aimard, N., Lathabai, S., Horn, R.G., Lawn, B.R.: Interfacial energy states of moisture-exposed cracks in mica. J. Mater. Res. 5, 172–182 (1990)
Wiederhorn, S.M., Freiman, S.W., Fuller, E.R., Simmons, C.J.: Effects of water and other dielectrics on crack growth. J. Mater. Sci. 17, 3460–3478 (1982)
Wondraczek, L., Dittmar, A., Oelgardt, C., Celarie, F., Ciccotti, M., Marliere, C.: Real-time observation of a non-equilibrium liquid condensate confined at tensile crack tips in oxide glasses. J. Am. Ceram. Soc. 89, 746–749 (2006)
Michalske, T.A., Fuller, E.R.: Closure and repropagation of healed cracks in silicate glass. J. Am. Ceram. Soc. 68, 586–590 (1985)
Wilson, B.A., Case, E.D.: In situ microscopy of crack healing in borosilicate glass. J. Mater. Sci. 32, 3163–3175 (1997)
Holden, M.K.C., Frechette, V.D.: Healing of glass in humid environments. J. Am. Ceram. Soc. 72, 2189–2193 (1989)
Lehman, R.L., Hill, R.E., Sigel, G.H.: Low-temperature crack closure in fluoride glass. J. Am. Ceram. Soc. 72, 474–477 (1989)
De Boer, M.P.: Capillary adhesion between elastically hard rough surfaces. Exp. Mech. 47, 171–183 (2007)
Soylemez, E., de Boer, M.P.: Capillary-induced crack healing between surfaces of nanoscale roughness. Langmuir 30, 11625–11633 (2014)
Xue, X., Polycarpou, A.A., Phinney, L.M.: Measurement and modeling of adhesion energy between two rough microelectromechanical system (MEMS) surfaces. J. Adhes. Sci. Technol. 22, 429–455 (2008)
Soylemez, E., de Boer, M.P., Ashurst, W.R.: Nucleation rate of capillary bridges between multi-asperity surfaces. MRS Proceedings, p. 1659. Cambridge University Press, Cambridge (2014)
Hariri, A., Zu, J.W., Mrad, R.: Ben: modeling of dry stiction in micro electro-mechanical systems (MEMS). J. Micromech. Microeng. 16, 1195–1206 (2006)
Sniegowski, J.J., de Boer, M.P.: IC-compatible polysilicon surface micromachining. Annu. Rev. Mater. Sci. 30, 299–333 (2000)
Meinhart, M., Miller, N., Saif, M.T.A.: Dry stiction of micro structures—theory and experiment. Proc. R. Soc. A Math. Phys. Eng. Sci. 462, 567–585 (2006)
Soylemez, E., Plass, R.A., Ashurst, W.R., de Boer, M.P.: Probing microelectromechanical systems in an environmentally controlled chamber using long working distance interferometry. Rev. Sci. Instrum. 84, 075006–1–075006–0750066 (2013)
De Boer, M.P., Michalske, T.A.: Accurate method for determining adhesion of cantilever beams. J. Appl. Phys. 86, 817–827 (1999)
DelRio, F.W., Dunn, M.L., Boyce, B.L., Corwin, A.D., de Boer, M.P.: The effect of nanoparticles on rough surface adhesion. J. Appl. Phys. 99, 104304 (2006)
DelRio, F.W., Dunn, M.L., Phinney, L.M., Bourdon, C.J., de Boer, M.P.: Rough surface adhesion in the presence of capillary condensation. Appl. Phys. Lett. 90, 163104 (2007)
Williams, D.B.G., Lawton, M.: Drying of organic solvents: quantitative evaluation of the efficiency of several desiccants. J. Org. Chem. 75, 8351–8354 (2010)
Greivenkamp, J.E., Bruning, J.H.: Optical Shop Testing. Wiley and Sons, New York (1992)
Jensen, B.D., Boer, M.P.De., Masters, N.D., Bitsie, F., Lavan, D.A.: Interferometry of actuated microcantilevers to determine material properties and test structure nonidealities in MEMS. J. Microelectromech. Syst. 10, 336–346 (2001)
Delrio, F.W., de Boer, M.P., Knapp, J.A., David Reedy, E., Clews, P.J., Dunn, M.L.: The role of van der Waals forces in adhesion of micromachined surfaces. Nat. Mater. 4, 629–634 (2005)
Bunker, B.C., Michalske, T.A.: Effect of surface corrosion on glass fracture. Springer, Boston, MA (1986)
Israelachvili, J.N.: Intermolecular and Surface Forces. Academic Press, Waltham (1992)
Soylemez, E.: Capillary kinetics between multi asperity surfaces. Ph.D. thesis, Carnegie Mellon University (2014)
Restagno, F., Bocquet, L., Biben, T.: Metastability and nucleation in capillary condensation. Phys. Rev. Lett. 84, 2433–2436 (2000)
Yaws, C.L.: Yaws’ Handbook of Thermodynamic and Physical Properties of Chemical Compounds. Knovel, New York (2003)
De Boer, M.P., de Boer, P.C.T.: Thermodynamics of capillary adhesion between rough surfaces. J. Colloid Interface Sci. 311, 171–185 (2007)
Asay, D.B., Kim, S.H.: Evolution of the adsorbed water layer structure on silicon oxide at room temperature. J. Phys. Chem. B 109, 16760–16763 (2005)
Wang, X., Zhao, M., Nolte, D.D.: Ambient molecular water accumulation on silica surfaces detected by a reflectance interference optical balance. Appl. Phys. Lett. 97(183702–1), 183702–183703 (2010)
Theillet, P.-O., Pierron, O.N.: Quantifying adsorbed water monolayers on silicon MEMS resonators exposed to humid environments. Sensors Actuators A Phys. 171, 375–380 (2011)
Christenson, H.K.: Phase behaviour in slits-when tight cracks stay wet. Colloids Surfaces A Physicochem. Eng. Asp. 124, 355–367 (1997)
Mate, C.M., Lorenz, M.R., Novotny, V.J.: Atomic force microscopy of polymeric liquid films. J. Chem. Phys. 90, 7550 (1989)
Asay, D.B., Kim, S.H.: Molar volume and adsorption isotherm dependence of capillary forces in nanoasperity contacts. Langmuir 23, 12174–12178 (2007)
Butt, H.-J.: Capillary forces : influence of roughness and heterogeneity. Langmuir 24, 4715–4721 (2008)
Rabinovich, Y.I., Adler, J.J., Esayanur, M.S., Ata, A., Singh, R.K., Moudgil, B.M.: Capillary forces between surfaces with nanoscale roughness. Adv. Colloid Interface Sci. 96, 213–230 (2002)
Thoreson, E.J., Burnham, N.A.: Standard-deviation minimization for calibrating the radii of spheres attached to atomic force microscope cantilevers. Rev. Sci. Instrum. 75, 1359–1362 (2004)
DelRio, F.W., Dunn, M.L., de Boer, M.P.: Capillary adhesion model for contacting micromachined surfaces. Scr. Mater. 59, 916–920 (2008)
DelRio, F.W., Dunn, M.L., de Boer, M.P.: Growth of silicon carbide nanoparticles using tetraethylorthosilicate for microelectromechanical systems. Electrochem. Solid-State Lett. 10, H27–H30 (2007)
Gellman, A.J.: Vapor lubricant transport in MEMS devices. Tribol. Lett. 17, 455–461 (2004)
Ku, I.S.Y., Reddyhoff, T., Holmes, A.S., Spikes, H.A.: Wear of silicon surfaces in MEMS. Wear 271, 1050–1058 (2011)
Dugger, M.T.: Tribological challenges in MEMS and their mitigation via vapor phase lubrication. SPIE Proc. 8031, 80311H1–80311H–11 (2011)
Acknowledgments
The authors gratefully acknowledge National Science Foundation funding through CMMI Grant No. CMMI 1030322. We also thank the technical staff in the Microelectronics Development Laboratory at Sandia National Labs in Albuquerque, NM, 87108 for fabricating the microcantilevers. We thank Professor W. Robert Ashurst for suggesting the use of the molecular sieves technique.
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Soylemez, E., de Boer, M.P. Crack Healing Between Rough Polycrystalline Silicon Hydrophilic Surfaces in n-Pentanol and Water Vapors. Tribol Lett 59, 5 (2015). https://doi.org/10.1007/s11249-015-0525-2
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DOI: https://doi.org/10.1007/s11249-015-0525-2