Skip to main content
SpringerLink
Log in

Effects of Pre-heat Treatment on Tribological Properties of DLC Film

  • Original Paper
  • Published:
Tribology Letters Aims and scope Submit manuscript

Abstract

A diamond-like carbon (DLC) film exhibits excellent tribological properties. This type of film has an amorphous structure that is generally composed of hydrogen and carbon atoms, and it is the structure of sp2- and sp3-hybridized orbital carbon which brings about the extraordinary tribological properties of the DLC film. It is known that heating causes structural changes in a DLC film, and pre-heat treatment greatly affects the various properties of a DLC film. In this study, we focus on the effects of pre-heat treatment on the friction and wear properties of a hydrogenated DLC film and discuss the structural changes in the film. After pre-heat treatment, the tribological properties were evaluated using a ball-on-disk sliding tester. Our findings indicated that the friction and wear properties of the DLC film were improved by pre-heating up to 500 °C. An as-deposited DLC film had a friction coefficient of approximately 0.15, whereas it was approximately 0.03 for a film pre-heated at 500 °C. The structure of the DLC film was analyzed using micro-laser Raman spectroscopy. The analytic results of the Raman spectroscopy of the film surface showed that the G peak position had shifted toward a higher wave number. This result suggested that hydrogen had evolved from the DLC film because of pre-heat treatment. The half bandwidth of the G peak shifted toward a lower wave number with increases in the pre-heating temperature. This indicated that graphitization of the DLC film had been induced by pre-heat treatment. From these findings, we consider that the hydrogen evolution induced structural changes. Line analysis using micro-laser Raman spectroscopy was performed on a cross section of the pre-heated DLC film. The line analysis showed structural changes which were induced by hydrogen evolution, on the top of the DLC film. On the other hand, hydrogen evolution and graphitization were prevented inside the film, indicating that a gradient structure had been generated by pre-heat treatment. The low friction coefficient of the pre-heated DLC film was caused by graphitization of the DLC film surface. The graphite layer on the top of the film would induce lower shearing resistance at the sliding interface. This gradient structure of the DLC film plays an important role in improving the tribological properties of the pre-heated DLC film.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12

Similar content being viewed by others

References

  1. Aisenberg, S., Chabot, R.: Ion-beam deposition of thin films of diamond like carbon. J. Appl. Phys. 42, 2953–2958 (1971)

    Article  CAS  Google Scholar 

  2. Erdemir, A.: Genesis of superlow friction and wear in diamond like carbon films. Tribol. Int. 37, 1005–1012 (2004)

    Article  CAS  Google Scholar 

  3. Vengadasamy, B., Mufti, R.A., Lamb, G.D., Green, J.H., Spikes, H.A.: Friction properties of DLC/DLC contacts in base oil. Tribol. Int. 44, 922–932 (2011)

    Article  Google Scholar 

  4. Grill, A.: Review of the tribology of diamond-like carbon. Wear 168, 143–153 (1993)

    Article  CAS  Google Scholar 

  5. Dai, A., Zhou, K., Yuan, Z., Ding, Q., Fu, Z.: The cutting performance of diamond and DLC-coated cutting tools. Diam. Relat. Mater. 9, 1753–1757 (2000)

    Article  CAS  Google Scholar 

  6. Vanhulsel, A., Velasco, F., Jacobs, R., Eersels, L., Havermans, D., Roberts, E.W., Sherrington, I., Anderson, M.J., Gaillard, L.: DLC solid lubricant coatings on ball bearings for space applications. Tribol. Int. 40, 1186–1194 (2007)

    Article  CAS  Google Scholar 

  7. Kano, M.: Super low friction of DLC applied to engine cam follower lubricated with ester-containing oil. Tribol. Int. 39, 1682–1685 (2006)

    Article  Google Scholar 

  8. Guo, C.T., Chen, P.C.: Amorphous hydrogenated carbon coatings on IC packaging mold by ECR-CVD system. Appl. Surf. Sci. 253, 9191–9197 (2007)

    Article  CAS  Google Scholar 

  9. Nakahigashi, T., Tanaka, Y., Miyake, K., Oohara, H.: Properties of flexible DLC film deposited by amplitude-modulated RF P-CVD. Tribol. Int. 37, 907–912 (2004)

    Article  CAS  Google Scholar 

  10. Huang, R.F., Chan, C.Y., Lee, C.H., Gong, J., Lai, K.H., Lee, C.S., Li, K.Y., Wen, L.S., Sun, C.: Wear-resistant multilayered diamond-like carbon coating prepared by pulse biased arc ion plating. Diam. Relat. Mater. 10, 1850–1854 (2001)

    Article  CAS  Google Scholar 

  11. Taki, Y., Kitagawa, T., Takai, O.: Preparation of diamond-like carbon thin films by arc ion plating. Mater. Sci. Lett. 16, 553–556 (1997)

    Article  CAS  Google Scholar 

  12. Arnell, R.D., Kelly, P.J.: Recent advances in magnetron sputtering. Surf. Coat. Technol. 112, 170–176 (1999)

    Article  CAS  Google Scholar 

  13. Grill, A.: Diamond-like carbon—state of the art. Diam. Relat. Mater. 8, 428–434 (1999)

    Article  CAS  Google Scholar 

  14. Erdemir, A.: The role of hydrogen in tribological properties of diamond-like carbon films. Surf. Coat. Technol. 146–147, 292–297 (2001)

    Article  Google Scholar 

  15. Conway, N.M.J., Ferrari, A.C., Flewitt, A.J., Robertson, J., Milne, W.I., Tagliaferro, A., Beyer, W.: Defect and disorder reduction by annealing in hydrogenated tetrahedral amorphous carbon. Diam. Relat. Mater. 9, 765–770 (2000)

    Article  CAS  Google Scholar 

  16. Zhang, P., Tay, B.K., Lau, S.P.: Rapid thermal annealing study on the metal containing amorphous carbon films. Diam. Relat. Mater. 12, 2093–2098 (2003)

    Article  CAS  Google Scholar 

  17. Xie, Z.W., Wang, L.P., Wang, X.F., Huang, L., Liu, Y., Yan, J.C.: Influence of high temperature annealing on the structure, hardness and tribological properties of diamond-like carbon and TiAlSiCN nanocomposite coatings. Appl. Surf. Sci. 258, 1206–1211 (2011)

    Article  CAS  Google Scholar 

  18. Ferrari, A.C., Kleinsorge, B., Morrison, N.A., Hart, A.: Stress reduction and bond stability during thermal annealing of tetrahedral amorphous carbon. Appl. Phys. 85, 7191–7197 (1999)

    Article  CAS  Google Scholar 

  19. Tallant, D.R., Parmeter, J.E., Siegal, M.P., Simpson, R.L.: The thermal stability of diamond-like carbon. Diam. Relat. Mater. 4, 191–199 (1995)

    Article  CAS  Google Scholar 

  20. Choi, W.S., Hong, B.: The effect of annealing on the properties of diamond-like carbon protective antireflection coatings. Renew. Energy 33, 226–231 (2008)

    Article  CAS  Google Scholar 

  21. Grill, A., Patel, V., Meyerson, B.S.: Optical and tribological properties of heat-treated diamond-like carbon. Diamond and diamond-like materials. J. Mater. Res. 5, 2531–2537 (1990)

    Article  CAS  Google Scholar 

  22. Knight, J.C., Page, T.F., Chandler, H.W.: Thermal instability of the microstructure and surface mechanical properties of hydrogenated amorphous carbon films. Surf. Coat. Technol. 49, 519–529 (1991)

    Article  CAS  Google Scholar 

  23. Li, H., Xu, T., Wang, C., Chen, J., Zhou, H., Liu, H.: Annealing effect on the structure, mechanical and tribological properties of hydrogenated diamond-like carbon films. Thin Solid Films 515, 2153–2160 (2006)

    Article  CAS  Google Scholar 

  24. Suzuki, M., Watanabe, T., Tanaka, A., Koga, Y.: Tribological properties of diamond-like carbon films produced by different deposition technique. Diam. Relat. Mater. 12, 2061–2065 (2003)

    Article  CAS  Google Scholar 

  25. Kirinuki, M., Onoi, M., Nishikawa, K., Oka, Y., Azuma, K., Fujiwara, E., Yatsuzuka, M.: Negative pulsed voltage discharge and DLC preparation in PBIID system. Thin Solid Films 506–507, 68–72 (2006)

    Article  Google Scholar 

  26. Nishimura, Y., Shinohara, M., Sato, Y.: Development of superimposed PBIID equipment for uniform and superthick DLC coatings. New Diam. Front. Carbon Technol. 16, 29–54 (2006)

    Google Scholar 

  27. Nakamizo, M., Kammerck, R., Walker Jr, P.L.: Laser Raman studies on carbons. Carbon 12, 259–267 (1974)

    Article  CAS  Google Scholar 

  28. Ferrari, A.C., Robertson, J.: Interpretation of Raman spectra of disordered and amorphous carbon. Phys. Rev. B 61(20), 14095–14107 (2000)

    Article  CAS  Google Scholar 

  29. Lee, E.H., Hembree, D.M., Rao, G.R., Mansur, L.K.: Raman scattering from ion-implanted diamond, graphite, and polymers. Phys. Rev. B 48, 540–551 (1993)

    Google Scholar 

  30. Kalish, R., Lifshitz, Y., Nugent, K., Prawer, S.: Thermal stability and relaxation in diamond-like-carbon. A Raman study of films with different sp3 fractions (ta-C to a-C). Appl. Phys. Lett. 74(20), 2936–2938 (1999)

    Article  CAS  Google Scholar 

  31. Micheler, J., Tobler, M., Blank, E.: Thermal annealing behavior of alloyed DLC films on steel: determination and modeling of mechanical properties. Diam. Relat. Mater. 8, 510–516 (1999)

    Article  Google Scholar 

  32. Mikami, T., Nakawaza, H., Kudo, M., Mashita, M.: Effects of hydrogen on film properties of diamond-like carbon films prepared by reactive radio-frequency magnetron sputtering using hydrogen gas. Thin Solid Films 488, 87–92 (2005)

    Article  CAS  Google Scholar 

  33. Schwan, J., Ulrich, S., Batori, V., Ehrhardt, H., Silva, S.R.P.: Raman spectroscopy on amorphous carbon films. Appl. Phys. 80, 440–447 (1996)

    Article  CAS  Google Scholar 

  34. Filik, J., May, P.W., Pearce, S.R.J., Wild, R.K., Hallam, K.R.: XPS and laser Raman analysis of hydrogenated amorphous carbon films. Diam. Relat. Mater. 12, 974–978 (2003)

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Tokyo Metropolitan Industrial Technology Research Institute, Aomi, Koto-ku, Tokyo, 135-0064, Japan

    Yuuki Tokuta, Masahiro Kawaguchi & Aya Shimizu

  2. Tokyo University of Science, 1-14-6 Kudankita, Chiyoda-ku, Tokyo, 102-0073, Japan

    Shinya Sasaki

Authors
  1. Yuuki Tokuta
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Masahiro Kawaguchi
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Aya Shimizu
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Shinya Sasaki
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Shinya Sasaki.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Tokuta, Y., Kawaguchi, M., Shimizu, A. et al. Effects of Pre-heat Treatment on Tribological Properties of DLC Film. Tribol Lett 49, 341–349 (2013). https://doi.org/10.1007/s11249-012-0073-y

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11249-012-0073-y

Keywords

Search

Navigation