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Dielectric and optical properties of BaTiO3 thin films prepared by low-temperature process

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Abstract

Barium titanate (BaTiO3) thin films have been prepared by low temperature processing on Pt/Ti/SiO2/Si substrates using sol-gel-hydrothermal (SGHT) technique, which combined the conventional sol-gel process and hydrothermal method. X-ray diffraction analysis showed that the barium titanate thin films are polycrystalline. As-reacted barium titanate films grown on Pt(111)/Ti/SiO2/Si(100) substrates had a dielectric constant (ε) and loss tangent (tanδ) of 80 and 0.05 at 1 MHz, respectively. The optical constants including refractive index n, extinction coefficient k, and absorption coefficient α of the barium titanate thin films in the wavelength range of 2.5–12.6 μm were obtained by infrared spectroscopic ellipsometry.

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Authors and Affiliations

  1. Functional Materials Research Laboratory, Tongji University, Shanghai, 200092, China

    Jinbao Xu, Jiwei Zhai & Xi Yao

  2. National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai, 200083, China

    Jianqiang Xue & Zhiming Huang

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  1. Jinbao Xu
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  2. Jiwei Zhai
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  3. Xi Yao
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  4. Jianqiang Xue
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Correspondence to Jiwei Zhai.

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Xu, J., Zhai, J., Yao, X. et al. Dielectric and optical properties of BaTiO3 thin films prepared by low-temperature process. J Sol-Gel Sci Technol 42, 209–212 (2007). https://doi.org/10.1007/s10971-007-0740-x

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