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Influence of substrate temperature on the optical properties of Sb-doped ZnO films prepared by MOCVD

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Abstract

The Sb-doped ZnO films were grown on c-plane sapphire by metal organic chemical vapor deposition technology with various substrate temperatures. We have examined the influence of the substrate temperature on the crystal, electrical and optical properties of the Sb-doped ZnO films. The XRD patterns indicated the undoped ZnO film and the Sb-doped ZnO films showed a strong preferred orientation toward the c-axis. Hall effects measurements revealed the Sb-doped ZnO films exhibited p-type electrical conductivity. Low temperature photoluminescence spectra confirmed the existence of Sb in ZnO films. The photoluminescence spectra of the Sb-doped ZnO films revealed the transition between the free electrons and acceptors peak at 3.243 eV, the acceptor-bound exciton peak at 3.319 eV. The thermal binding energy of the Sb accepter was estimated to be about 0.19 eV.

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Acknowledgments

This work was supported by the National Natural Science Foundation of China (Nos. 11304028, 21473015, 11375035), the Liaoning Province Doctor Scientific Research Foundation of China (Nos. 201601079), the Fundamental Research Funds for the Central Universities (Nos. 3132016124, 3132015145, 3132015141, 3132014327, 3132014337), the Foundation for the Author of National Excellent Doctoral Dissertation of PR China (201222).

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Authors and Affiliations

  1. Department of Physics, Dalian Maritime University, Dalian, 116026, People’s Republic of China

    Yi Cheng, Kun Yang, Jixiang Chen, Bo Jing, Li Che & Hongming Yin

  2. School of Physics and Optoelectronic Engineering, Dalian University of Technology, Dalian, 116024, People’s Republic of China

    Hongwei Liang & Guotong Du

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  1. Yi Cheng
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  2. Kun Yang
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  3. Jixiang Chen
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Correspondence to Yi Cheng or Kun Yang.

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Cheng, Y., Yang, K., Chen, J. et al. Influence of substrate temperature on the optical properties of Sb-doped ZnO films prepared by MOCVD. J Mater Sci: Mater Electron 28, 2602–2606 (2017). https://doi.org/10.1007/s10854-016-5836-z

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