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Quantitative pressure and strain field analysis of helium precipitates in silicon

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Abstract

The structural properties of overpressurised helium precipitates formed by low dose ion implantation and subsequent annealing of silicon are investigated by quantitative transmission electron microscopy techniques. These precipitates, which show pronounced platelet geometry, are analysed with respect to their geometry, crystallographic orientation and their particular gas pressure values. The dependence of the measured platelet pressure versus the radius is discussed in terms of a Griffith crack. Experimental results on the shape and the crystallographic orientation of the platelets are discussed in the framework of anisotropic elastic properties and surface energies of silicon. The ability of the precipitates to punch-out dislocation loops is discussed in terms of associated threshold shear stress values and evaluated with regard to the defect size dependency.

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Acknowledgements

The authors cordially thank Bernd Holländer and Siegfried Mantl for the fruitful cooperation during realisation of the implantation experiments, for guidance of the SRIM calculations as well as for helpful discussions.

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Authors and Affiliations

  1. Institute of Solid State Research, Research Centre Jülich, D-52425, Jülich, Germany

    Norbert Hueging, Martina Luysberg, Helmut Trinkaus, Karsten Tillmann & Knut Urban

  2. Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons, Research Centre Jülich, D-52425, Jülich, Germany

    Norbert Hueging, Martina Luysberg & Knut Urban

  3. Center for Nanoelectronic Systems for Information Technology, Research Centre Jülich, D-52425, Jülich, Germany

    Norbert Hueging, Martina Luysberg, Helmut Trinkaus, Karsten Tillmann & Knut Urban

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  1. Norbert Hueging
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  2. Martina Luysberg
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  3. Helmut Trinkaus
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  4. Karsten Tillmann
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  5. Knut Urban
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Correspondence to Martina Luysberg.

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Hueging, N., Luysberg, M., Trinkaus, H. et al. Quantitative pressure and strain field analysis of helium precipitates in silicon. J Mater Sci 41, 4454–4465 (2006). https://doi.org/10.1007/s10853-006-0153-1

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  • DOI: https://doi.org/10.1007/s10853-006-0153-1

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