Abstract
Sigma-delta modulation has been widely used in micro-machined accelerometers. Previous researches are mainly focused on increasing the order of the sigma-delta modulator for the mechanical sensor to improving the performance of the micro-machined accelerometers. These designs performed well in high resolution acceleration measurement, but they are insufficient in balancing the proof mass quickly while the micro-machined accelerometer is working. In this paper, the design of order-adjustable micro-machined accelerometer is proposed. It employs a mechanical sensor to balance the proof mass, and a fifth order MEMS accelerator to measure the acceleration with high resolution. Furthermore, this work shows an optimized design with a SQNR of 156.5 and 73.6 dB which can accurately measure the acceleration input and quickly balance the proof mass, respectively.
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References
Saxena, G. D. & Thamarai, V. (2011). Modeling and simulation of high performance sixth order sigma-delta MEMS accelerometer. International Conference on Computational Intelligence and Communication Networks (pp. 527–531).
Petkov, V. P., & Boser, B. (2006). High-order electromechanical modulation in micromachined inertial sensors. IEEE Transactions Circuits and Systems I Fundamental Theory and Applications, 53(5), 1016–1022.
Petkov, V. P., & Boser, B. (2005). A fourth-order interface for micromachined inertial sensors. IEEE Journal of Solid-State Circuits, 40(8), 1602–1609.
Dong, Y., Kraft, M., Gollasch, C., & Redman-White, W. (2005). A high performance accelerometer with a fifth-order modulator. Journal of Micromechanics and Microengineering, 15(7), 22–29.
van Veldhoven, R. H. M., & van Roermund, A. H. M. (2010). Robust sigma delta converter and their application in low-power highly-digitized flexible receivers. Dordrecht: Springer.
Schreier, R. (1993). An empirical study of higher-order single-bit delta-sigma modulators. IEEE Transaction Circuits and Systems II: Analog and Digital Signal Processing, 40(8), 461–466.
Raman, J., et al. (2008). An unconstrained architecture for systematic design of higher order sigma delta force-feedback loops. IEEE Transactions on Circuits and Systems, 55, 1601–1614.
Henrion, W. (2012). Wide dynamic range direct digital output accelerometer. In Proceedings Solid State Sensors and Actuators Workshop, Hilton Head Is-land, SC, USA, 1990 (pp. 153–157).
Liang, W. Q., Yang, C. C., & Qiao, D. H. (2012). On the design of feed-forward Σ∆ interface for MEMS based accelerometers. Analog Integrated Circuits and Signal Processing, 72(1), 3–10.
Acknowledgments
Project supported by Hunan Provincial Natural Science Foundation of China (12JJ4064), the State Key Program of National Natural Science of China (Grant No. 61233010) and by the Program for New Century Excellent Talents in University of Ministry of Education of China (NCET-11-0975).
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Wang, L., Xie, L. & Jin, X. A design of order-adjustable Σ∆ modulator for high performance micro-machined accelerometers. Analog Integr Circ Sig Process 80, 77–84 (2014). https://doi.org/10.1007/s10470-014-0304-2
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DOI: https://doi.org/10.1007/s10470-014-0304-2