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Flexible interferometry for optical aspheric and free form surfaces

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Abstract

A flexible interferometry is proposed to test concave optical aspheric and free-form surfaces. It employs a flexible aberration generator (FAG) consisting of a movable reflective sphere (MRS) and two counter-rotating optical wedges (CROW). The FAG is able to generate low-order Zernike aberrations to compensate the inherent aberrations of the test surface by the rotation of wedges in CROW and translation (or tilt) of the MRS. For some surfaces with mild departure, the FAG would result in a resolvable interferogram by the different aberrations compensation and the flexible test is thus achieved. The practical calibration for FAG is also reported. After calibration, experiment results showing the validity of the flexible test are presented by testing an ellipsoidal mirror and an off-axis paraboloidal mirror.

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Acknowledgements

This work was supported by the National Natural Science Foundation of China (61705002, 61675005, 61440010) and Doctoral startup fund of Anhui University (J01003208).

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Authors and Affiliations

  1. Key Laboratory of Opto-electronic Information Acquisition and Manipulation Ministry of Education, Anhui University, Hefei, 230601, China

    Lei Zhang, Yu Liu, Yusi Bai, Jingsong Li & Benli Yu

  2. Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, 621900, China

    Dong Li

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  1. Lei Zhang
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  2. Dong Li
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  3. Yu Liu
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  4. Yusi Bai
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Correspondence to Lei Zhang.

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Zhang, L., Li, D., Liu, Y. et al. Flexible interferometry for optical aspheric and free form surfaces. Opt Rev 24, 677–685 (2017). https://doi.org/10.1007/s10043-017-0363-6

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