Abstract
Simulation of MEMS-based, microelectromechanical-systems, radio frequency (RF) passive components, i.e. RF-MEMS, is not an easy task, as it involves the coupling of different physical domains (mechanical, electrical, electromagnetic). This work discusses the exploitation of a software library of elementary MEMS behavioural models, in order to predict the multi-physical behaviour of a complex RF-MEMS switch geometry, i.e. a toggle-switch. The elementary models developed and available in the software library are implemented in an HDL (hardware description language) programming code and can therefore be exploited within standard development environments for integrated circuits.
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Iannacci, J. Fast simulation of an RF-MEMS toggle-switch through a behavioural models software library of elementary components. Microsyst Technol 26, 3613–3621 (2020). https://doi.org/10.1007/s00542-020-04831-8
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DOI: https://doi.org/10.1007/s00542-020-04831-8