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A novel SU-8 nanofluidic chip fabrication technique based on traditional UV photolithography

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Abstract

Nanofluidic chips are becoming increasingly important for biological and chemical applications due to the special phenomena only occur in nanochannels. In this study, a simple and low-cost method for fabricating SU-8 nanofluidic chips is proposed based on traditional ultraviolet (UV) photolithography. The thermal-induced cracks (nanochannels) can be automatically formed by thermal stress release during the postbake process. The influence of pattern-shape, pattern-angle and pattern-distance on the maximum stress of the SU-8 patterns was investigated. And the effect of postbake temperature on the maximum stress of the SU-8 patterns was also analyzed. The numerical and experimental results show that when the triangle SU-8 patterns with pattern-angle of 60° is postbaked at 125 °C, the nanocracks can be easily formed between two patterns. With this newly developed technology, simple, low-cost and large scale nanofluidic chips can be fabricated only by traditional UV photolighography, which allows a commercially manufacturing of nano-components.

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References

  • Cheng JY, Rettner CT, Sanders DP, Kim HC, Hinsberg WD (2008) Dense self-assembly on sparse chemical patterns: rectifying and multiplying lithographic patterns using block copolymers. Adv Mater 20(16):3155–3158

    Article  Google Scholar 

  • Chuanhua D, Wei W, Quan X (2013) Review article: fabrication of nanofluidic devices. Biomicrofluidics 7(2):026501

    Article  Google Scholar 

  • Chun D, Kim SH, Song H, Kwak S, Kim Y, Seok H, Lee S-M, Lee JH (2013) Fast myoglobin detection using nanofluidic electrokinetic trapping technique. Appl Phys Express 6(1):017001

    Article  Google Scholar 

  • Faustini M, Vayer M, Marmiroli B, Hillmyer M, Amenitsch H, Sinturel C, Grosso D (2010) Bottom-up approach toward titanosilicate mesoporous pillared planar nanochannels for nanofluidic applications. Chem Mater 22(20):5687–5694

    Article  Google Scholar 

  • Freedman KJ, Haq SR, Edel JB, Jemth P, Kim MJ (2013) Single molecule unfolding and stretching of protein domains inside a solid-state nanopore by electric field. Sci Rep 3:1638

    Article  Google Scholar 

  • Gillespie D, Pennathur S (2013) Separation of ions in nanofluidic channels with combined pressure-driven and electro-osmotic flow. Anal Chem 85(5):2991–2998

    Article  Google Scholar 

  • Hui Y, Yu L, Yi-ge Z, Feng-bin W, Feng-yun H, Xing-hua X (2008) A simple, disposable microfluidic device for rapid protein concentration and purification via direct-printing. Lab Chip 8(9):1496–1501

    Article  Google Scholar 

  • Ilic B, Czaplewski D, Zalalutdinov M, Schmidt B, Craighead HG (2002) Fabrication of flexible polymer tubes for micro and nanofluidic applications. J Vac Sci Technol, B 20(6):2459–2465

    Article  Google Scholar 

  • Lin P, Nakagawa W, Fainman Y (2003) Fabrication of optical structures using SU-8 photoresist and chemically assisted ion beam etching. Opt Eng 42(10):2912–2917

    Article  Google Scholar 

  • Lorenz H, Despont M, Fahrni N, LaBianca N, Renaud P, Vettiger P (1997) SU-8: a low-cost negative resist for MEMS. J Micromech Microeng 7(3):121–124

    Article  Google Scholar 

  • Menard LD, Ramsey JM (2011) Fabrication of sub-5 nm nanochannels in insulating substrates using focused ion beam milling. Nano Lett 11(2):512–517

    Article  Google Scholar 

  • Onses MS, Song C, Williamson L, Sutanto E, Ferreira PM, Alleyne AG, Nealey PF, Ahn H, Rogers JA (2013) Hierarchical patterns of three-dimensional block-copolymer films formed by electrohydrodynamic jet printing and self-assembly. Nat Nanotechnol 8(9):667–675

    Article  Google Scholar 

  • Pedersen JN, Marie R, Bauer DLV, Rasmussen KH, Yusuf M, Volpi EV, Kristensen A, Mir KU, Flyvbjerg H (2013) Fully streched single DNA molecules in a nanofluidic chip show large-scale structural variation. Biophys J 104(2):175A

    Article  Google Scholar 

  • Saleem MR, Stenberg PA, Khan MB, Khan ZM, Honkanen S, Turunen J (2012) HSQ resist for replication stamp in polymers. Adv Fabr Technol Micro/Nano Opt Photonics V 8249, Article no 82490G

  • Sang J, Du H, Wang W, Chu M, Wang Y, Li H, Zhang HA, Wu W, Li Z (2013) Protein sensing by nanofluidic crystal and its signal enhancement. Biomicrofluidics 7(2):024112

    Article  Google Scholar 

  • Shin S, Kim BS, Song J, Lee H, Cho HH (2012) A facile route for the fabrication of large-scale gate-all-around nanofluidic field-effect transistors with low leakage current. Lab Chip 12(14):2568–2574

    Article  Google Scholar 

  • Sivanesan P, Okamoto K, English D, Lee CS, DeVoe DL (2005) Polymer nanochannels fabricated by thermomechanical deformation for single-molecule analysis. Anal Chem 77(7):2252–2258

    Article  Google Scholar 

  • Sparreboom W, van den Berg A, Eijkel JCT (2009) Principles and applications of nanofluidic transport. Nat Nanotechnol 4(11):713–720

    Article  Google Scholar 

  • Tsukahara T (2010) Nanofluidic-based separation system of radionuclide ions by controlling electrostatic forces. Bull Res Lab Nucl React 34:51

    Google Scholar 

  • van Kan JA, Zhang C, Malar PP, van der Maarel JRC (2012) High throughput fabrication of disposable nanofluidic lab-on-chip devices for single molecule studies. Biomicrofluidics 6(3):036502

    Article  Google Scholar 

  • Wu W, Walmsley RG, Li WD, Li X, Williams RS (2012) Nanoimprint lithography with <= 60 nm overlay precision. Appl Phys A Mater Sci Process 106(4):767–772

    Article  Google Scholar 

  • Xiangdong Y, Hongzhong L, Yucheng D (2009) Research on the cast molding process for high quality PDMS molds. Microelectron Eng 86(3):310–313

    Article  Google Scholar 

  • Yasui T, Kaji N, Ogawa R, Hashioka S, Tokeshi M, Horiike Y, Baba Y (2011) DNA separation in nanowall array chips. Anal Chem 83(17):6635–6640

    Article  Google Scholar 

  • Yunqiao W, Jun Z, Pun EYB (2011) Controllable fabrication of enclosed micro/nanochannels via polymethyl methacrylate pattern as sacrificial template and capillary effect. J Microlith Microfab Microsys 10(4):049701

    Google Scholar 

  • Zhang YN, Reisner W (2015) Fabrication and characterization of nanopore-interfaced nanochannel devices. Nanotechnology 26(45):455301

    Article  Google Scholar 

  • Zhou K, Li L, Tan Z, Zlotnick A, Jacobson SC (2011) Characterization of hepatitis B virus capsids by resistive-pulse sensing. J Am Chem Soc 133(6):1618–1621

    Article  Google Scholar 

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Acknowledgements

This project is supported by Specialized Research Fund for the Doctoral Program of Higher Education of China (SRFDP) (No. 20120041110034).

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Authors and Affiliations

  1. School of Mechanical Science and Engineering, Jilin University, Changchun, 130012, China

    Zhifu Yin

  2. Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, 110179, China

    Bolin Lu

  3. Key Laboratory for Micro/Nano Technology and Systems of Liaoning Province, Dalian University of Technology, Dalian, 116024, China

    Helin Zou

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  1. Zhifu Yin
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  2. Bolin Lu
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  3. Helin Zou
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Correspondence to Zhifu Yin.

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Yin, Z., Lu, B. & Zou, H. A novel SU-8 nanofluidic chip fabrication technique based on traditional UV photolithography. Microsyst Technol 23, 5613–5619 (2017). https://doi.org/10.1007/s00542-017-3331-y

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  • DOI: https://doi.org/10.1007/s00542-017-3331-y

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