1 Erratum to: Microsyst Technol DOI 10.1007/s00542-016-3213-8

Unfortunately, the eighth sentence of the Abstract contains an error in the original publication.

The correct sentence is given below:

The peak to peak tracking error of less than 2% for the desired displacement of 18 μm with tracking frequency of 10 Hz is also achieved. The original article has been updated accordingly.