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Modeling and test result of closed-loop MEMS accelerometer with wide dynamic range

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Abstract

MEMS technology has been applied in many fields including deep oil exploration and seismic detection areas, of which poor performance has limited its development until the sigma-delta modulation is added. Many of researches for improving the performance of MEMS acceleration sensor had been put forward. In this paper, an effective way for design of feed-forward sigma-delta for MEMS acceleration sensor is proposed. It is well know that simulation parameters are mainly about two parts including mechanical parameters and sigma-delta modulator parameters. Different mechanical parameters match the different sigma-delta parameters. Furthermore, the simulation model is designed successfully under idea environment in MATLAB, which cannot indicate it can reach the same performance in real environment through taped out. Therefore, the useful model parameters which had been verified by taped out can be the most valuable parameters for MEMS readout design. In this paper, the work shows an optimized parameters design with signal to noise ration (SNR) of 148 dB and its experimental result can reach 142 dB.

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Acknowledgments

Project supported by the state key program of National Natural Science of China (Grant No. 61233010), by the National Natural Science Foundation of China (Grant No. 61274043) and by Hunan Provincial Natural Science Fund for Distinguished Young Scholars (2015JJ1014).

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Authors and Affiliations

  1. School of Physics and Optoelectronics, Xiangtan University, Xiangtan, 411105, China

    Feng Zhang, Xiangliang Jin & Longsheng Wang

  2. Hunan Engineering Laboratory for Microelectronics, Optoelectronics and System on a Chip, Xiangtan, China

    Feng Zhang, Xiangliang Jin & Longsheng Wang

Authors
  1. Feng Zhang
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  2. Xiangliang Jin
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  3. Longsheng Wang
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Correspondence to Xiangliang Jin.

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Zhang, F., Jin, X. & Wang, L. Modeling and test result of closed-loop MEMS accelerometer with wide dynamic range. Microsyst Technol 22, 653–657 (2016). https://doi.org/10.1007/s00542-015-2410-1

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  • DOI: https://doi.org/10.1007/s00542-015-2410-1

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