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Novel piezoelectric actuator control slider using transverse-mode deformation

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Abstract

This work proposes a novel structure design of active slider with a piezoelectric actuator at the top of the slider body and a soft layer between the substrate and head elements, to efficiently control the flying height of slider. A parametric simulation was performed to obtain an optimize dimension of PZT actuator and the most efficient soft material. Then three types of slider structures were designed and investigated with considering air bearing effects to achieve large actuation efficiency.

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Authors and Affiliations

  1. Department of Mechanical Engineering, Wuhan University, Wuhan, 430072, People’s Republic of China

    Shengnan Shen & Hui Li

  2. Nanyang Technological University, 50 Nanyang Avenue, Singapore, 639798, Singapore

    Shengnan Shen & Hejun Du

  3. Data Storage Institute, DSI Building, 5 Engineering Drive 1, Singapore, 117608, Singapore

    Bo Liu

Authors
  1. Shengnan Shen
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  2. Hui Li
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  3. Hejun Du
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  4. Bo Liu
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Correspondence to Hui Li.

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Shen, S., Li, H., Du, H. et al. Novel piezoelectric actuator control slider using transverse-mode deformation. Microsyst Technol 20, 2271–2276 (2014). https://doi.org/10.1007/s00542-014-2217-5

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  • DOI: https://doi.org/10.1007/s00542-014-2217-5

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