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Refractive index change detection based on porous silicon microarray

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Abstract

By combining photolithography with the electrochemical anodization method, a microarray device of porous silicon (PS) photonic crystal was fabricated on the crystalline silicon substrate. The optical properties of the microarray were analyzed with the transfer matrix method. The relationship between refractive index and reflectivity of each array element of the microarray at 633 nm was also studied, and the array surface reflectivity changes were observed through digital imaging. By means of the reflectivity measurement method, reflectivity changes below 10−3 can be observed based on PS microarray. The results of this study can be applied to the detection of biosensor arrays.

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Acknowledgments

This work was supported by the National Science Foundation of China (Nos. 61265009 and 61575168), Xinjiang Science and Technology Project (No. 201412112).

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Authors and Affiliations

  1. School of Physical Science and Technology, Xinjiang University, Ürümqi, 830046, People’s Republic of China

    Weirong Chen & Peng Li

  2. School of Information Science and Engineering, Xinjiang University, Ürümqi, 830046, People’s Republic of China

    Zhenhong Jia & Xiaoyi Lv

  3. The First Teaching Hospital of Xinjiang Medical University, Ürümqi, 830046, People’s Republic of China

    Guodong Lv

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  1. Weirong Chen
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  2. Zhenhong Jia
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  3. Peng Li
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  5. Xiaoyi Lv
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Correspondence to Zhenhong Jia.

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Chen, W., Jia, Z., Li, P. et al. Refractive index change detection based on porous silicon microarray. Appl. Phys. B 122, 120 (2016). https://doi.org/10.1007/s00340-016-6405-0

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