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Applications of porous silicon formed by electrochemical etching using an electrolyte based on HF:formaldehyde

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Abstract

In this work, we report the experimental results on the formation of porous silicon (PSi) monolayers by electrochemical etching using a formaldehyde based electrolyte. The results were compared with PSi monolayers obtained with the traditional electrolyte (HF:ethanol). Both electrolytes facilitate the removal of H2 generated as a subproduct during the electrochemical etching process in the surface of the c-Si substrate. Formaldehyde presents a good affinity to surfaces and interfaces and the excess of water in the electrolyte reduces the pore sizes of PSi samples. The porosity and etching rate values are similar than those obtained using HF:et solutions. The refractive index values are the same in both cases at the same porosity in the visible range. The results have shown that the chemical characteristics of the ethanol and formaldehyde can give some different advantages to the PSi process and its applications.

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References

  1. A. Uhlir, A. Uhlir, Bell Syst. Tech. J. 35, 333 (1956)

    Google Scholar 

  2. L.T. Canham, Appl. Phys. Lett. 57, 1046 (1990)

    Article  ADS  Google Scholar 

  3. R.C. Erson, R.S. Muller, C.W. Tobias, Sens. Actuators A, Phys. 23, 835 (1990)

    Article  Google Scholar 

  4. A. Halimaoui, Appl. Phys. Lett. 63, 1264 (1993)

    Article  ADS  Google Scholar 

  5. V. Lehmann, in Ordered Porous Nanostructures and Applications, ed. by R.B. Wehrspohn (Springer, New York, 2005), p. 3

    Chapter  Google Scholar 

  6. I. Ferreira, E. Fortunato, R. Martins, Sens. Actuators B, Chem. 100, 236 (2004)

    Article  Google Scholar 

  7. R.J. Betsch, J. Cryst. Growth 77, 210 (1986)

    Article  ADS  Google Scholar 

  8. A. Halimaoui, in Properties of Porous Silicon, ed. by L.T. Canham (Institution of Electrical Engineers, London, 1997), p. 12

    Google Scholar 

  9. E.D. Palik, in Handbook of Optical Constants of Solids, ed. by E.D. Palik (Academic Press, Orlando, 1985)

    Google Scholar 

  10. M. Ben-Chorin, A. Kux, I. Schechter, Appl. Phys. Lett. 64, 481 (1994)

    Article  ADS  Google Scholar 

  11. W. Gerhartz, Y.S. Yamamoto, B. Elvers, J. Rounsaville, in Ullmann’s Encyclopedia of Industrial Chemistry, 5th. edn., vol. A11 (VCH, New York, 1988), pp. 354–358

    Google Scholar 

  12. G.X. Zhang, in Modern Aspects of Electrochemistry, vol. 39, ed. by C. Vayenas, C.G. Vayenas, R.E. White (Springer, New York, 2005)

    Google Scholar 

  13. H. Juárez, T. Díaz, E. Rosendo, G. García S, M. Rubín, M. Pacio, C. Morales, A. García, Phys. Status Solidi C 4, 1610 (2007)

    Article  Google Scholar 

  14. G. García Salgado, T. Díaz Becerril, H. Juárez Santiesteban, E. Rosendo Andrés, Opt. Mater. 29, 51 (2006)

    Article  ADS  Google Scholar 

  15. D. Stievenard, D. Deresmes, Appl. Phys. Lett. 67, 1570 (1995)

    Article  ADS  Google Scholar 

  16. C. Delerue, M. Lannoo, G. Allan, E. Martin, Thin Solid Films 255, 27 (1995)

    Article  ADS  Google Scholar 

  17. C. Cadet, D. Deresmes, D. Vuillaume, D. Stievenard, Appl. Phys. Lett. 64, 2827 (1994)

    Article  ADS  Google Scholar 

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Acknowledgements

This work was partially supported by VD-BUAP/PIFI funds provided through the CA: Física Aplicada. M.E.C. wants to acknowledge to CONACYT for the financial support under Grant No. 167993. The authors want to acknowledge the assistance of Dr. Victor Rejón (CINVESTAV-Merida) for HRSEM images.

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Authors and Affiliations

  1. Instituto de Física, Benemérita Universidad Autónoma de Puebla, Apdo. Postal J-48, 72570, Puebla, Pue., Mexico

    S. De La Luz Merino, A. Méndez-Blas & M. E. Calixto

  2. CIDS-ICUAP, Benemérita Universidad Autónoma de Puebla, Ciudad Universitaria, Ed. 103D, Col. San Manuel, 72570, Puebla, Mexico

    F. Morales-Morales, F. G. Nieto-Caballero & G. García-Salgado

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  1. S. De La Luz Merino
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  2. F. Morales-Morales
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  3. A. Méndez-Blas
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  4. M. E. Calixto
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  5. F. G. Nieto-Caballero
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  6. G. García-Salgado
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Correspondence to M. E. Calixto.

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De La Luz Merino, S., Morales-Morales, F., Méndez-Blas, A. et al. Applications of porous silicon formed by electrochemical etching using an electrolyte based on HF:formaldehyde. Appl. Phys. A 111, 1077–1083 (2013). https://doi.org/10.1007/s00339-012-7529-7

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  • DOI: https://doi.org/10.1007/s00339-012-7529-7

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