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Fabrication of large-area hole arrays using high-efficiency two-grating interference system and femtosecond laser ablation

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Abstract

We present a novel method to fabricate hole arrays by forming a four-beam interference pattern with two gratings. In this method a femtosecond laser beam is split into four and collected to interfere using two cascaded diffractive gratings. One benefit of this grating pair is that it is achromatic, because of the geometry of the grating pair, and therefore it is suitable for femtosecond ablation. Grating pairs were designed and fabricated for a standard Ti:sapphire femtosecond laser, with 800-nm central wavelength, so that the interference pattern generates holes with less than 1-μm diameter. Holes with this size diffract with a colorful visual appearance in the visible wavelength range and therefore these structures are suitable for security, authentication and decorative marking. We show that this method is suitable for fast ablation of hole arrays in both silicon and steel.

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References

  1. R.R. Hershey, E.N. Leith, Appl. Opt. 29, 937 (1990)

    Article  ADS  Google Scholar 

  2. M. Wei, D.T. Attwood, T.K. Gustafson, E.H. Anderson, J. Vac. Sci. Technol. B 12, 3648 (1994)

    Article  Google Scholar 

  3. H.H. Solak, C. David, J. Gobrecht, V. Golovkina, F. Cerrina, S.O. Kim, P.F. Nealey, Microelectron. Eng. 67–68, 56 (2003)

    Article  Google Scholar 

  4. J.-H. Klein-Wiele, J. Bekesi, P. Simon, Appl. Phys. A 79, 775 (2004)

    Article  ADS  Google Scholar 

  5. J. Bekesi, J.-H. Klein-Wiele, P. Simon, Appl. Phys. A 76, 355 (2003)

    Article  ADS  Google Scholar 

  6. K. Paivasaari, J.J.J. Kaakkunen, M. Kuittinen, T. Jaaskelainen, Opt. Express 15, 13838 (2007)

    Article  ADS  Google Scholar 

  7. K. Paivasaari, V.K. Tikhomirov, J. Turunen, Opt. Express 15, 2336 (2007)

    Article  ADS  Google Scholar 

  8. N.H. Rizvi, RIKEN Rev. 50, 107 (2003)

    Google Scholar 

  9. P. Simon, J. Ihlemann, Appl. Phys. A 63, 505 (1996)

    Article  ADS  Google Scholar 

  10. H.H. Solak, C. David, J. Gobrecht, L. Wang, F. Cerrina, Microelectron. Eng. 61–62, 77 (2002)

    Article  Google Scholar 

  11. H.H. Solak, C. David, J. Gobrecht, L. Wang, F. Cerrina, J. Vac. Sci. Technol. B 20, 2844 (2002)

    Article  Google Scholar 

  12. A. Couairon, A. Mysyrowicz, Phys. Rep. 441, 47 (2007)

    Article  ADS  Google Scholar 

  13. A.A. Maznev, T.F. Crimmins, K.A. Nelson, Opt. Lett. 23, 1378 (1998)

    Article  ADS  Google Scholar 

  14. Y. Nakata, T. Okada, M. Maeda, Appl. Phys. A 79, 1481 (2004)

    ADS  Google Scholar 

  15. J.-H. Klein-Wiele, P. Simon, Appl. Phys. Lett. 83, 4707 (2003)

    Article  ADS  Google Scholar 

  16. J. Bekesi, J. Meinertz, J. Ihlemann, P. Simon, Appl. Phys. A 93, 27 (2008)

    Article  ADS  Google Scholar 

  17. C.N. Andersson, P.P. Naulleau, Appl. Opt. 47, 1327 (2008)

    Article  ADS  Google Scholar 

  18. J. Turunen, F. Wyrowski, Diffractive Optics for Industrial and Commercial Applications (Akademie, Berlin, 1997)

    Google Scholar 

  19. Y.-S. Cheng, Appl. Opt. 23, 3057 (1984)

    Article  ADS  Google Scholar 

  20. P. Rai-Choudhury, Microlithography. Handbook of Microlithography, Micromachining, and Microfabrication, vol. 1 (SPIE, Bellingham, 1997)

    Google Scholar 

Download references

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Authors and Affiliations

  1. Department of Physics and Mathematics, University of Eastern Finland, Joensuu Campus, P.O. Box 111, Joensuu, 80101, Finland

    J. J. J. Kaakkunen, K. Paivasaari & P. Vahimaa

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  1. J. J. J. Kaakkunen
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  2. K. Paivasaari
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  3. P. Vahimaa
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Correspondence to J. J. J. Kaakkunen.

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Kaakkunen, J.J.J., Paivasaari, K. & Vahimaa, P. Fabrication of large-area hole arrays using high-efficiency two-grating interference system and femtosecond laser ablation. Appl. Phys. A 103, 267–270 (2011). https://doi.org/10.1007/s00339-011-6366-4

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  • DOI: https://doi.org/10.1007/s00339-011-6366-4

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