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Minimum spacing between suspended nanorods determined by stiction during two-photon polymerization

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Abstract

The influence of stiction on the minimum spacing between suspended nanorods fabricated by femtosecond-laser-induced two-photon polymerization has been investigated. The minimum spacing is predicted based on a theoretical model calculating the adhesion length of a nanorod pair, which is in good agreement with the experimental results for suspended nanorods with feature size of around 200 nm. This is helpful for the polymerization of three-dimensional functional nanostructures.

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Correspondence to Yan Li.

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Sun, MZ., Li, Y., Cui, HB. et al. Minimum spacing between suspended nanorods determined by stiction during two-photon polymerization. Appl. Phys. A 100, 177–180 (2010). https://doi.org/10.1007/s00339-010-5732-y

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  • DOI: https://doi.org/10.1007/s00339-010-5732-y

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