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Size control of Si nanocrystals by two-step rapid thermal annealing of sputtered Si-rich oxide/SiO2 superlattice

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Abstract

Controllable size of silicon (Si) nanocrystals can be achieved by a two-step rapid thermal annealing technique consisting of rapid annealing at 1000°C in nitrogen ambient and rapid oxidation at 600–800°C of a radio frequency magnetron co-sputtered Si-rich oxide/SiO2 superlattice structure. The photoluminescence (PL) spectra related to Si nanocrystals were observed in the visible range (600–900 nm). After rapid oxidation, the size of the nanocrystals was reduced and the quality of the Si nanocrystal/SiO2 interface was improved, resulting in a blue shift and an increase of the PL peak intensity. Finally, annealing in air increases the PL intensity further.

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References

  1. A. Barranco, F. Yubero, J.P. Espinos, F. Groening, A.R. Gonzales-Elipe, J. Appl. Phys. 97, 113714 (2005)

    Article  ADS  Google Scholar 

  2. S.K. Bera, S. Chaudhuri, A.K. Bandyopadhyay, B.R. Chakraborty, A.K. Pal, J. Phys., D. Appl. Phys. 34, 273 (2001)

    Article  ADS  Google Scholar 

  3. F. Iacona, G. Franzo, C. Spinella, J. Appl. Phys. 87, 1295 (2000)

    Article  ADS  Google Scholar 

  4. M. Zacharias, J. Heitmann, R. Scholz, U. Kahler, M. Schmidt, J. Blasing, Appl. Phys. Lett. 80, 661 (2002)

    Article  ADS  Google Scholar 

  5. F. Gourbilleau, X. Portier, C. Ternon, P. Voivenel, R. Madelon, R. Rizk, Appl. Phys. Lett. 78, 3058 (2001)

    Article  ADS  Google Scholar 

  6. P. Photopoulos, A.G. Nassiopoulou, D.N. Kauvatsos, A. Travlos, Appl. Phys. Lett. 76, 3588 (2000)

    Article  ADS  Google Scholar 

  7. M.L. Bongersma, A. Polman, K.S. Min, E. Boer, T. Tambo, H.A. Atwater, Appl. Phys. Lett. 72, 2577 (1998)

    Article  ADS  Google Scholar 

  8. S.T.H. Silalahi, H.Y. Yang, K. Pita, Y. Mingbin, Electrochem. Solid-State Lett. 12, K29 (2009)

    Article  Google Scholar 

  9. D.B. Kao, J.P. McVittie, W.D. Nix, K.C. Saraswat, IEEE Trans. Electron Devices ED-35, 25 (1988)

    Article  ADS  Google Scholar 

  10. K.C. Sheer, R.A. Rao, R. Muralidhar, S. Bagchi, J. Conner, L. Lozano, C. Perez, M. Sadd, B.E. White Jr., J. Appl. Phys. 93, 5637 (2003)

    Article  ADS  Google Scholar 

  11. M.W. Wolkin, J. Jornie, P.M. Fauchet, G. Allan, C. Delerue, Phys. Rev. Lett. 82, 197 (1999)

    Article  ADS  Google Scholar 

  12. J.S. Bitten, N.S. Lewis, H.A. Atwater, A. Polman, Appl. Phys. Lett. 84, 5389 (2004)

    Article  ADS  Google Scholar 

Download references

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Authors and Affiliations

  1. Photonics Research Centre, School of Electrical and Electronic Engineering, Nanyang Technological University, Nanyang Avenue, Singapore, 639798, Republic of Singapore

    Samson T. H. Silalahi, Q. V. Vu & K. Pita

  2. Nanoelectronics Laboratory, School of Electrical and Electronic Engineering, Nanyang Technological University, Nanyang Avenue, Singapore, 639798, Republic of Singapore

    H. Y. Yang

  3. NanoElectronics and Photonics, Institute of Microelectronics, Singapore Science Park II, 11 Science Park Road, Singapore, 117685, Republic of Singapore

    Samson T. H. Silalahi & Yu Mingbin

Authors
  1. Samson T. H. Silalahi
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  2. Q. V. Vu
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  3. H. Y. Yang
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  4. K. Pita
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  5. Yu Mingbin
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Correspondence to K. Pita.

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Silalahi, S.T.H., Vu, Q.V., Yang, H.Y. et al. Size control of Si nanocrystals by two-step rapid thermal annealing of sputtered Si-rich oxide/SiO2 superlattice. Appl. Phys. A 98, 867–871 (2010). https://doi.org/10.1007/s00339-010-5555-x

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  • DOI: https://doi.org/10.1007/s00339-010-5555-x

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