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Femtosecond laser microfabrication of periodic structures using a microlens array

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Abstract

A microlens array (MLA) was applied for femtosecond laser microfabrication. Two-dimensional periodic patterns that corresponded to the arrangement of lenses in the MLA were recorded by ablation on a glass surface. The two-dimensional periodic patterns were recorded by a single exposure without scanning of the laser beam or the sample, and worked as a grating. Optical resizing of the patterns and high efficiency of fabrication are demonstrated and discussed.

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Authors and Affiliations

  1. Graduate School of Engineering, The University of Tokushima and JST-CREST, 2-1 Minamijosanjimacho, Tokushima, 770-8506, Japan

    S. Matsuo

  2. Research Institute of Electronic Science, Hokkaido University and JST-CREST, N21, W10, CRIS Bldg., Kita-ku, Sapporo, 001-0021, Japan

    S. Juodkazis & H. Misawa

Authors
  1. S. Matsuo
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  2. S. Juodkazis
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  3. H. Misawa
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Correspondence to S. Matsuo.

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PACS

42.82.Cr; 07.60.Pb; 42.62.Cf

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Matsuo, S., Juodkazis, S. & Misawa, H. Femtosecond laser microfabrication of periodic structures using a microlens array. Appl. Phys. A 80, 683–685 (2005). https://doi.org/10.1007/s00339-004-3108-x

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  • DOI: https://doi.org/10.1007/s00339-004-3108-x

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