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The effects of ambient oxygen pressure on the 1.54 μm photoluminescence of Er-doped silicon-rich silicon oxide films grown by laser ablation of a Si+Er target

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Abstract

We fabricated Er-doped silicon-rich silicon oxide (SRSO:Er) films by pulsed laser deposition. A Si+Er target consisting of an Er metallic strip and a silicon disk was adopted with a goal to achieve a convenient control of the Er and oxygen density in the film. We found that the photoluminescence (PL) at 1.54 μm is highly dependent on the ambient oxygen pressure, which determines the relative ratio of Si-Si, SiOx, and SiO2 phase in the film. The PL intensity increased drastically with increase in the annealing temperature and reached the maximum intensity at 500 °C.

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References

  1. H. Ennen, J. Schneider, G. Pomrenke, A. Axmann: Appl. Phys. Lett. 43, 943 (1983)

    Article  ADS  Google Scholar 

  2. W.L. Ng, M.P. Temple, P.A. Childs, F. Wellhofer, K.P. Homewood: Appl. Phys. Lett. 75, 97 (1999)

    Article  ADS  Google Scholar 

  3. J.S. Ha, C.H. Bae, S.H. Nam, S.M. Park, Y.R. Jang, K.H. Yoo, K. Park: Appl. Phys. Lett. 82, 3436 (2003)

    Article  ADS  Google Scholar 

  4. C. Li, K. Kondo, T. Makimura, K. Murakami: Appl. Surf. Sci. 197–198, 607 (2002)

    Google Scholar 

  5. S. Komuro, T. Katsumata, T. Morikawa, X. Zhao, H. Isshiki, Y. Aoyagi: Appl. Phys. Lett. 74, 377 (1999)

    Article  ADS  Google Scholar 

  6. G.N. van den Hoven, J.H. Shin, A. Polman, S. Lombardo, S.U. Campisano: J. Appl. Phys. 78, 2642 (1995)

    Article  ADS  Google Scholar 

  7. M. Schmidt, J. Heitmann, R. Scholz, M. Zacharias: J. Non-Cryst. Solids 299–302, 678 (2002)

    Google Scholar 

  8. D.J. Lockwood: Light Emission in Silicon: From Physics to Devices, Chapt. 4 (Academic Press, New York 1998)

  9. M. Fujii, M. Yoshida, S. Hayashi, K. Yamamoto: J. Appl. Phys. 84, 4525 (1998)

    Article  ADS  Google Scholar 

  10. T. Inokuma, Y. Wakayama, T. Muramoto, R. Aoki, Y. Kurata, S. Hasegawa: J. Appl. Phys. 83, 2228 (1998)

    Article  ADS  Google Scholar 

  11. A.J. Kenyon: Prog. Quant. Electron. 26, 225 (2002)

    Article  ADS  Google Scholar 

  12. A.R. Zanatta: Appl. Phys. Lett. 82, 1395 (2003)

    Article  ADS  Google Scholar 

  13. M. Ishii, T. Ishikawa, T. Ueki, S. Komuro, T. Morikawa, Y. Aoyagi, H. Oyanagi: J. Appl. Phys. 85, 4024 (1999)

    Article  ADS  Google Scholar 

  14. S. Komuro, S. Maruyama, T. Morikawa, X. Zhao, H. Isshiki, Y. Aoyagi: Appl. Phys. Lett. 69, 3896 (1996)

    Article  ADS  Google Scholar 

Download references

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Authors and Affiliations

  1. Department of Chemical and Biological Engineering, Korea University, Seoul, South Korea

    J.S. Ha

  2. Basic Research Laboratory, Electronics and Telecommunications Research Institute, Daejon, South Korea

    G.Y. Sung & S. Lee

  3. Department of Physics, Kyunghee University, Seoul, South Korea

    Y.R. Jang & K.H. Yoo

  4. Department of Chemistry, Kyunghee University, Seoul, South Korea

    C.H. Bae, J.S. Jeon, S.H. Nam & S.M. Park

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  1. J.S. Ha
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  2. G.Y. Sung
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  3. S. Lee
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  4. Y.R. Jang
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  5. K.H. Yoo
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  6. C.H. Bae
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  7. J.S. Jeon
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  8. S.H. Nam
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  9. S.M. Park
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Correspondence to J.S. Ha.

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PACS

81.15.Fg; 81.07.-b

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Ha, J., Sung, G., Lee, S. et al. The effects of ambient oxygen pressure on the 1.54 μm photoluminescence of Er-doped silicon-rich silicon oxide films grown by laser ablation of a Si+Er target. Appl. Phys. A 79, 1485–1488 (2004). https://doi.org/10.1007/s00339-004-2826-4

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  • DOI: https://doi.org/10.1007/s00339-004-2826-4

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