Skip to main content
Log in

Model of metal surface erosion under irradiation by high-power pulsed ion beams

  • Published:
Journal of Engineering Thermophysics Aims and scope

Abstract

The mechanisms of erosion of metal surfaces under the action of submicrosecond (10−9−10−6 s) ion beams in the power density range of P = 106−109 W/cm2 with a particle energy of 1–2000 keV are considered. It is shown that the collective processes associated with the radiation heating of the surface are of great importance. A model for the erosion is proposed. In accordance with this model, the flow of atoms of the target leaving the surface being irradiated consists of two independent components caused by collisional sputtering and evaporation, respectively. The influence of the irradiation parameters on the erosion coefficient and the ratio between the sputtering and evaporation factors is analyzed.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. Renk, T.J., Provencio, P.P., Prasad, S.V. et al., Proceedings of the IEEE, 2004, vol. 92, no. 7, pp. 1057–1081.

    Article  Google Scholar 

  2. Saltymakov, M.S., Lie, Zeng, Remnev, G.E. et al., Izv. VUZov, Fizika, 2006, no. 8, Appendix, pp. 371–373.

    Google Scholar 

  3. Struts, V.K., Matvienko, V.M., Petrov, A.V, Ryabchikov, A.I. et al., Proc. 7th International Conference on Modification of Materials with Particles Beams and Plasma Flows, Tomsk, 25–30 July 2004, pp. 465–468.

    Google Scholar 

  4. Bleicher, G.A., Krivobokov, VP, and Pashchenko, O.V, Teplomassoperenos v tverdom tele pod deistviem moshchnykh puchkov zaryazhennykh chastits (Heat and Mass Transfer in Solids under the Action of High-Power Beams of Charged Particles), Novosibirsk: Nauka, 1999.

    Google Scholar 

  5. Nelson, R.S., Phil. Mag., 1965, vol. 11, no. 110, pp. 291–302.

    Article  ADS  Google Scholar 

  6. Raspyleniye tverdykh tel ionnoi bombardirovkoi (Sputtering of Solids by Ion Bombardment), Berish, R., Ed., Moscow: Mir, 1984.

    Google Scholar 

  7. Fundamental'nye i prikladnye aspekty raspyleniya tverdykh tel (Fundamental and Applied Aspects of Sputtering of Solids), Mashkova, E.S., Ed., Moscow: Mir, 1989.

    Google Scholar 

  8. Tompson, M.W., Phil. Mag., 1968, vol. 18, no. 152, pp. 377–414.

    Article  ADS  Google Scholar 

  9. Krutenat, R.C. and Panzera, C., J. Appl. Phys., 1970, vol. 41, no. 12, pp. 4953–4957.

    Article  ADS  Google Scholar 

  10. Vaulin, E.P, Georgieva, N.E., and Martynenko, T.P., Fizika tverdogo tela, 1977, vol. 19, no. 5, pp. 1423–1425.

    Google Scholar 

  11. Raspyleniye pod deistviem bombardirovki chastitsami (Sputtering under the Action of Bombardment by Particles), Berish, R. and Vittmak, K., Eds., Moscow: Mir, 1998.

    Google Scholar 

  12. Pleshivtsev, N.V. and Bazhin, A.I., Fizika vozdeistviya ionnykh puchkov na materialy (Physics of Ion Beam Action on Materials), Moscow: Vuzovskaya kniga, 1998.

    Google Scholar 

  13. Krivobokov, V.P., Pashchenko, O.V, Sapul'skaya G.A. et.al, Fizika i khimiya obrabotki materialov (Physics and Chemistry of Material Treatment), 1991, no. 6, pp. 2532.

    Google Scholar 

  14. Gabovich, M.D., Pleshivtsev, N.V. and Semashko, N.N., Puchki ionov i atomov dlya upravlyaemogo termoyadernogo sinteza i tekhnologicheskikh tselei (Beams of Ions and Atoms for Controlled Thermonuclear Fusion and Technological Purposes), Moscow: Energoatomizdat, 1986.

    Google Scholar 

  15. Itogi nauki i tekhniki. Fizika plazmy (Achievements of Science and Engineering. Plasma Physics), Mikhailov, A.I., Ed., Moscow: VINITI, 1982, vol. 3.

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to G. A. Bleicher.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Bleicher, G.A., Krivobokov, V.P. Model of metal surface erosion under irradiation by high-power pulsed ion beams. J. Engin. Thermophys. 17, 24–29 (2008). https://doi.org/10.1007/s11823-008-1003-3

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11823-008-1003-3

Keywords

Navigation