Abstract
Generation of powerful THz radiation from intrinsic Josephson Junctions (IJJs) of Bi2Sr2CaCu2O8+δ (Bi2212) may require mesas with large lateral dimensions. However, there are difficulties in fabrication of perfect rectangular mesas. The lateral angles of mesas should be close to 90 degrees to obtain IJJs with same planar dimensions for synchronization of IJJs. We patterned Ta/photoresist and photoresist/Ta/photoresist masks on Bi2212 and used selective ion etching to overcome the thick photoresist layer shading on the lateral dimension of mesa during the ion-beam etching. The reactive ion-beam etchings have been done with ion beams of Ar, N2 and O2, and we have obtained mesas about 1 μm with lateral angle of approximately 50 to 75°, which is better than the mesas fabricated with photoresist mask.
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References
Tonouchi, M.: Cutting-edge terahertz technology. Nat. Photonics 1, 97–105 (2007)
Bae, M.H., Lee, H.C.: Progress in THz generation using Josephson fluxon dynamics in intrinsic junctions. IEICE Trans. Electron. E 89, 411 (2006)
Tachiki, M., Koyama, T., Takahashi, S.: Electromagnetic Phenomena Related to a low frequency plasma in cuprate superconductors. Phys. Rev. B 50, 7065 (1994)
Kleiner, R., Steinmeyer, F., Kunkel, G., Müller, P.: Intrinsic Josephson effects in Bi2Sr2CaCu2O8 single crystals. Phys. Rev. Lett. 68, 2394 (1992)
Ozyuzer, L., Zasadzinski, J.F., Miyakawa, N.: Tunneling spectra and superconducting gap in Bi2Sr2CaCu2O8+d and Tl2Ba2CuO6+d . Int. J. Mod. Phys. B 13, 3721 (1999)
Ozyuzer, L., Koshelev, A.E., Kurter, C., Gopalsami, N., Li, Q., Tachiki, M., Kadowaki, K., Tamamoto, T., Minami, H., Yamaguchi, H., Tachiki, T., Gray, K.E., Kwok, W.K., Welp, U.: Emission of coherent THz radiation from superconductors. Science 318, 1291 (2007)
Ozyuzer, L., Simsek, Y., Koseoglu, H., Turkoglu, F., Kurter, C., Welp, U., Koshelev, A.E., Gray, K.E., Kwok, W.K., Yamamoto, T., Kadowaki, K., Koval, Y., Wang, H.B., Muller, P.: Terahertz wave emission from intrinsic Josephson junctions in high-Tc superconductors. Supercond. Sci. Technol. 22, 114009 (2009)
Hu, X., Lin, S.Z.: Supercond. Sci. Technol. 23, 053001 (2010)
Tuna, O., Selamet, Y., Aygun, G., Ozyuzer, L.: High quality ITO thin films grown by DC and RF sputtering without oxygen. J. Phys. D, Appl. Phys. 43, 055402 (2010)
Nagai, Y., Tsuru, K., Terada, A., Yanagisawa, K.: Micropatterning of high-Tc superconducting film by nitrogen ion beam and Ta/resist multilayer mask. IEEE Trans. Magn. 27, 1622 (1991)
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Koseoglu, H., Turkoglu, F., Simsek, Y. et al. The Fabrication of THz Emitting Mesas by Reactive Ion-Beam Etching of Superconducting Bi2212 with Multilayer Masks. J Supercond Nov Magn 24, 1083–1086 (2011). https://doi.org/10.1007/s10948-010-0859-9
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DOI: https://doi.org/10.1007/s10948-010-0859-9