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Fabrication of Low-Noise TES Arrays for the SAFARI Instrument on SPICA

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Abstract

Ultra-low-noise transition edge sensors (TES) with noise equivalent power lower than 2 \(\times \) 10\(^{-19}\) W/Hz\(^{1/2 }\) have been fabricated by SRON, which meet the sensitivity requirements for the far-infrared SAFARI instrument on space infrared telescope for cosmology and astrophysics. Our TES detector is based on a titanium/gold (Ti/Au) thermistor on a silicon nitride (SiN) island. The island is thermally linked with SiN legs to a silicon support structure at the bath temperature. The SiN legs are very thin (250 nm), narrow (500 nm), and long (above 300 \({\upmu } \)m); these dimensions are needed in leg-isolated bolometers to achieve the required level of sensitivity. In this paper, we describe the latest fabrication process for our TES bolometers with improved sensitivity.

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References

  1. B.D. Jackson et al., IEEE Trans. THz Sci. Technol. 2, 12 (2012)

    Article  Google Scholar 

  2. P. Khosropanah et al., J. Low Temp. Phys. 167(3–4), 188 (2012)

    Article  ADS  Google Scholar 

  3. L. Gottardi et al., J. Low Temp. Phys. 176, 279 (2014)

    ADS  Google Scholar 

  4. W. Holland et al., MNRAS 430, 2513–2533 (2013)

    Article  ADS  Google Scholar 

  5. D.M. Glowacka et al., J. Low Temp. Phys. 151, 249 (2008)

    Article  ADS  Google Scholar 

  6. T. Suzuki et al., IEEE Trans. THz Sci. Technol. 4(2), 171–178 (2014)

    Article  Google Scholar 

  7. P. Khosropanah et al., J. Low Temp. Phys. 176, 363 (2014)

    Article  ADS  Google Scholar 

  8. T. Suzuki et al., J. Low Temp. Phys. This Special Issue (2015)

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Acknowledgments

We acknowledge Gene Hilton and Dan Schmidt at NIST, Boulder, USA, for sharing their process recipe for the crystal bonding with us. Their helps and supports are really crucial for the success of our new fabrication route described in this paper. The authors would also like to thank Frank Dirne at TU Delft for his support for DRIE process and Ton van der Linden for making the SEM pictures.

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Authors and Affiliations

  1. SRON Netherlands Institute for Space Research, Utrecht, The Netherlands

    M. L. Ridder, P. Khosropanah, R. A. Hijmering, T. Suzuki, M. P. Bruijn, H. F. C. Hoevers & J. R. Gao

  2. Kavli Institute of NanoScience, Delft University of Technology, Delft, The Netherlands

    J. R. Gao & M. R. Zuiddam

  3. Japan Aerospace Exploration Agency, Tsukuba, Japan

    T. Suzuki

Authors
  1. M. L. Ridder
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  2. P. Khosropanah
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  3. R. A. Hijmering
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  4. T. Suzuki
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  5. M. P. Bruijn
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  6. H. F. C. Hoevers
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  7. J. R. Gao
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  8. M. R. Zuiddam
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Correspondence to M. L. Ridder.

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Ridder, M.L., Khosropanah, P., Hijmering, R.A. et al. Fabrication of Low-Noise TES Arrays for the SAFARI Instrument on SPICA. J Low Temp Phys 184, 60–65 (2016). https://doi.org/10.1007/s10909-015-1381-z

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  • DOI: https://doi.org/10.1007/s10909-015-1381-z

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