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Low-power electrically controlled thermoelastic microvalves integrated in thermoplastic microfluidic devices

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Abstract

One of the major needs for the successful miniaturization of microfluidic systems is the integration of portable, low-voltage, low-power microvalves to manipulate the fluid flow through a network of microchannels. We report here a low-power, thermally actuated, elastomer-based microvalve with thermal isolation, which is then integrated in a thermoplastic microfluidic device. In the 6-layer design of each microvalve, the microfabricated heater that provides the thermal energy for the valve actuation is thermally isolated via an insulation cavity which reduces the heat dissipation to the surrounding. The 6-layer all-plastic microvalve was fabricated and showed a 40 % reduction in power consumption compared to the 4-layer design when the same duration was used for closing valves. A thermal model using COMSOL software was created to obtain further insight to the temperature profile in the microvalve region. The model was validated by comparing the simulated temperatures with experimentally measured values. The simulated values closely agreed with the measured temperatures. In addition, a two-step power application was created, which further reduced the power requirement. An initial power of 37 mW was used to close the valve in 11 s. After closure, a lower second-step power of 12 mW enabled the valve to remain closed for 15 min, which was only one-third of the initial power. By combining structural and operational improvement, the overall power consumption of the microvalve was reduced by 80 %. The 6-layer microvalve with two-step operation has the potential to realize a battery-operated microfluidic device for biological assays.

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References

  • Au AK, Lai H, Utela BR, Folch A (2011) Microvalves and micropumps for BioMEMS. Micromachines 2:179–220

    Article  Google Scholar 

  • Baechi D, Buser R, Dual J (2002) A high density microchannel network with integrated valves and photodiodes. Sens Actuators A 95:77–83

    Article  Google Scholar 

  • Baroud CN, Delville J-P, Gallaire F, Wunenburger R (2007) Thermocapillary valve for droplet production and sorting. Phys Rev E 75:046302

    Article  Google Scholar 

  • Boone TD, Fan ZH, Hooper HH, Ricco AJ, Tan H, Williams SJ (2002) Plastic advances microfluidic devices. Anal Chem 74:78A–86A

    Article  Google Scholar 

  • Carlen ET, Mastrangelo CH (2002) Surface micromachined paraffin-actuated microvalve. J Microelectromech Syst 11:408–420

    Article  Google Scholar 

  • Gu P, Liu K, Chen H, Nishida T, Fan ZH (2011) Chemical-assisted bonding of thermoplastics/elastomer for fabricating microfluidic valves. Anal Chem 83:446–452

    Article  Google Scholar 

  • Gu P, Nishida T, Fan ZH (2014) The use of polyurethane as an elastomer in thermoplastic microfluidic devices and the study of its creep properties. Electrophoresis 35:289–297

    Article  Google Scholar 

  • Gui L, Liu J (2004) Ice valve for a mini/micro flow channel. J Micromech Microeng 14:242

    Article  Google Scholar 

  • Guo Z-Y, Li Z-X (2003) Size effect on single-phase channel flow and heat transfer at microscale. Int J Heat Fluid Flow 24:284–298

    Article  Google Scholar 

  • Henning AK (2006) Comprehensive model for thermopneumatic actuators and microvalves. J Microelectromech Syst 15:1308–1318

    Article  Google Scholar 

  • Incropera FP, DeWitt DP (2002) Introduction to heat transfer. Wiley, New York

    Google Scholar 

  • Kaigala GV, Hoang VN, Backhouse CJ (2008) Electrically controlled microvalves to integrate microchip polymerase chain reaction and capillary electrophoresis. Lab Chip 8:1071–1078

    Article  Google Scholar 

  • Kim J-H, Na K-H, Kang CJ, Kim Y-S (2005) A disposable thermopneumatic-actuated micropump stacked with PDMS layers and ITO-coated glass. Sens Actuators A 120:365–369

    Article  Google Scholar 

  • Liu K, Fan ZH (2011) Thermoplastic microfluidic devices and their applications in protein and DNA analysis. Analyst 136:1288–1297

    Article  Google Scholar 

  • Liu RH, Bonanno J, Yang J, Lenigk R, Grodzinski P (2004) Single-use, thermally actuated paraffin valves for microfluidic applications. Sens Actuators B Chem 98:328–336

    Article  Google Scholar 

  • Oh KW, Ahn CH (2006) A review of microvalves. J Micromech Microeng 16:R13

    Article  Google Scholar 

  • Ozsun O, Alaca BE, Yalcinkaya AD, Yilmaz M, Zervas M, Leblebici Y (2009) On heat transfer at microscale with implications for microactuator design. J Micromech Microeng 19:045020

    Article  Google Scholar 

  • Pal S, Xie HK (2009) A parametric dynamic compact thermal model of an electrothermally actuated micromirror. J Micromech Microeng 19:065007

    Article  Google Scholar 

  • Pal R, Yang M, Johnson BN, Burke DT, Burns MA (2004) Phase change microvalve for integrated devices. Anal Chem 76:3740–3748

    Article  Google Scholar 

  • Pitchaimani K, Sapp BC, Winter A, Gispanski A, Nishida T, Fan ZH (2009) Manufacturable plastic microfluidic valves using thermal actuation. Lab Chip 9:3082–3087

    Article  Google Scholar 

  • Rich CA, Wise KD (2003) A high-flow thermopneumatic microvalve with improved efficiency and integrated state sensing. J Microelectromech Syst 12:201–208

    Article  Google Scholar 

  • Robertson JK, Wise KD (1998) A low pressure micromachined flow modulator. Sens Actuators A 71:98–106

    Article  Google Scholar 

  • Rogge T, Rummler Z, Schomburg WK (2004) Polymer micro valve with a hydraulic piezo-drive fabricated by the AMANDA process. Sens Actuators A 110:206–212

    Article  Google Scholar 

  • Ruzzu A, Bade K, Fahrenberg J, Maas D (1998) Positioning system for catheter tips based on an active microvalve system. J Micromech Microeng 8:161

    Article  Google Scholar 

  • Shaikh KA, Shifeng L, Chang L (2008) Development of a latchable microvalve employing a low-melting-temperature metal alloy. J Microelectromech Syst 17:1195–1203

    Article  Google Scholar 

  • Srinivasan P, Spearing SM (2009) Material selection for optimal design of thermally actuated pneumatic and phase change microactuators. J Microelectromech Syst 18:239–249

    Article  Google Scholar 

  • Takao H, Miyamura K, Ebi H, Ashiki M, Sawada K, Ishida M (2005) A MEMS microvalve with PDMS diaphragm and two-chamber configuration of thermo-pneumatic actuator for integrated blood test system on silicon. Sens Actuators A 119:468–475

    Article  Google Scholar 

  • Unger MA, Chou HP, Thorsen T, Scherer A, Quake SR (2000) Monolithic microfabricated valves and pumps by multilayer soft lithography. Science 288:113–116

    Article  Google Scholar 

  • Wang J, Chen Z, Mauk M, Hong K-S, Li M, Yang S, Bau H (2005) Self-actuated, thermo-responsive hydrogel valves for lab on a chip. Biomed Microdevices 7:313–322

    Article  Google Scholar 

  • Weibel DB, Kruithof M, Potenta S, Sia SK, Lee A, Whitesides GM (2005) Torque-actuated valves for microfluidics. Anal Chem 77:4726–4733

    Article  Google Scholar 

  • Yang X, Grosjean C, Tai Y-C, Ho C-M (1998) A MEMS thermopneumatic silicone rubber membrane valve. Sens Actuators A 64:101–108

    Article  Google Scholar 

  • Yoo J-C, Choi YJ, Kang CJ, Kim Y-S (2007) A novel polydimethylsiloxane microfluidic system including thermopneumatic-actuated micropump and paraffin-actuated microvalve. Sens Actuators A 139:216–220

    Article  Google Scholar 

Download references

Acknowledgments

This work is supported in part by National Institute of Health (R21GM103535), Defense Advanced Research Projects Agency (DARPA) via Micro/Nano Fluidics Fundamental Focus Center at the University of California at Irvine, and the University of Florida.

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Authors and Affiliations

  1. Interdisciplinary Microsystems Group, Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL, 32611-6200, USA

    Shancy Augustine & Toshikazu Nishida

  2. Interdisciplinary Microsystems Group, Department of Mechanical and Aerospace Engineering, University of Florida, Gainesville, FL, 32611-6250, USA

    Pan Gu, Xiangjun Zheng & Z. Hugh Fan

  3. J. Crayton Pruitt Family Department of Biomedical Engineering, University of Florida, Gainesville, FL, 32611-6131, USA

    Z. Hugh Fan

  4. Department of Chemistry, University of Florida, Gainesville, FL, 32611-7200, USA

    Z. Hugh Fan

Authors
  1. Shancy Augustine
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  2. Pan Gu
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  3. Xiangjun Zheng
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  4. Toshikazu Nishida
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  5. Z. Hugh Fan
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Correspondence to Toshikazu Nishida or Z. Hugh Fan.

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Augustine, S., Gu, P., Zheng, X. et al. Low-power electrically controlled thermoelastic microvalves integrated in thermoplastic microfluidic devices. Microfluid Nanofluid 19, 1385–1394 (2015). https://doi.org/10.1007/s10404-015-1653-6

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  • DOI: https://doi.org/10.1007/s10404-015-1653-6

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