Summary
Superconductive thin films of Y−Ba−Cu−O have been grownin situ by r.f. magnetron sputtering from a single stoichiometric target on Al2O3 substrates. Zero-resistivity temperatures as high as 73 K have been achieved. X-ray and EDS analyses have been performed on the samples. The dependence of film features on deposition conditions is also discussed.
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Partially supported by Istituto Nazionale di Fisica della Materia.
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Andreone, A., Barone, A., Di Chiara, A. et al. In situ superconducting Y−Ba−Cu−O thin films by single-target r.f. magnetron sputtering. Il Nuovo Cimento D 13, 477–483 (1991). https://doi.org/10.1007/BF02452131
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DOI: https://doi.org/10.1007/BF02452131