Skip to main content

Advertisement

SpringerLink
Log in

Optical and mechanical properties of AlF3 films produced by pulse magnetron sputtering of Al targets with CF4/O2 gas

  • Regular Papers
  • Published:
Optical Review Aims and scope Submit manuscript

Abstract

In this study, AlF3 thin films were deposited by pulse magnetron sputtering of Al targets with different ratios of CF4/O2 gas and at different sputtering powers. The optical and mechanical properties of the AlF3 thin films were analyzed. The transmittance spectra showed no obvious negative inhomogeneous refractive indices. Denser films with a low optical absorption were obtained when high sputtering powers were used (larger than 30 W). The lowest extinction coefficient (7.3 × 10−4 at 193 nm) of the films can be reached with 12 sccm O2 flow rate and at 160W sputtering power. All of the residual stresses were compressive and their trends were consistent with the refractive indices. The lowest compressive stress (0.068 GPa) was obtained when the AlF3 films were prepared at 160W sputtering power.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. C. C. Lee, M. C. Liu, M. Kaneko, K. Nakahira, and Y. Takano: Appl. Opt. 44 (2005) 7333.

    Article  ADS  Google Scholar 

  2. F. Rainer, W. H. Lowdermilk, D. Milam, C. K. Carniglia, T. T. Hart, and T. L. Lichtenstein: Appl. Opt. 24 (1985) 496.

    Article  ADS  Google Scholar 

  3. J. D. Targove, J. P. Lehan, L. J. Lingg, H. A. Macleod, J. A. Leavitt, and L. C. McIntyre: Appl. Opt. 26 (1987) 3733.

    Article  ADS  Google Scholar 

  4. N. Toyoda and I. Yamada: Surf. Coat. Technol. 201 (2007) 8620.

    Article  Google Scholar 

  5. Y. Taki: Vacuum 74 (2004) 431.

    Article  Google Scholar 

  6. T. Yoshida, K. Nishimoto, K. Sekine, and K. Etoh: Appl. Opt. 45 (2006) 1375.

    Article  ADS  Google Scholar 

  7. M. Kennedy, D. Ristau, and H. S. Niederwald: Thin Solid Films 333 (1998) 191.

    Article  ADS  Google Scholar 

  8. B. H. Liao, M. C. Liu, and C. C. Lee: Appl. Opt. 47 (2008) C41.

    Article  ADS  Google Scholar 

  9. C. C. Lee, B. H. Liao, and M. C. Liu: Opt. Express 15 (2007) 9152.

    Article  ADS  Google Scholar 

  10. C. C. Lee, B. H. Liao, and M. C. Liu: Opt. Express 16 (2008) 6904.

    Article  ADS  Google Scholar 

  11. A. Zuber, N. Kaiser, and J. L. Stehlé: Thin Solid Films 261 (1995) 37.

    Article  ADS  Google Scholar 

  12. A. R. Forouhi and I. Bloomer: Phys. Rev. B 38 (1998) 1865.

    Article  ADS  Google Scholar 

  13. C. C. Lee, C. L. Tien, W. S. Sheu, and C. C. Jaing: Rev. Sci. Instrum. 72 (2001) 2128.

    Article  ADS  Google Scholar 

  14. G. G. Stoney: Proc. R. Soc. London, Ser. A 82 (1909) 172.

    Article  ADS  Google Scholar 

  15. P. Hariharan, B. F. Oreb, and T. Eiju: Appl. Opt. 26 (1987) 2504.

    Article  ADS  Google Scholar 

  16. M. J. Kushner: J. Appl. Phys. 53 (1982) 2923.

    Article  ADS  Google Scholar 

  17. K. Iwase, P. C. Selvin, G. Sato, and T. Fujii: J. Phys. D 35 (2002) 1934.

    Article  ADS  Google Scholar 

  18. H. J. Koa, H. J. Leea, K. M. Leeb, and C. K. Choi: J. Ceram. Process. Res. 7 (2006) 172.

    Google Scholar 

  19. A. Anders: Thin Solid Films 502 (2006) 22.

    Article  ADS  Google Scholar 

  20. M. Zukic, D. G. Torr, J. F. Spann, and M. R. Torr: Appl. Opt. 29 (1987) 4284.

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Thin Film Technology Center/Department of Optics and Photonics, National Central University, Chungli, Taiwan, 320

    Bo-Huei Liao, Cheng-Chung Lee & Ming-Chung Liu

  2. Department of Electronic Engineering, Optoelectronics Technology Research Center, Minghsin University of Science and Technology, Hsinchu, 304, Taiwan

    Cheng-Chung Jaing

Authors
  1. Bo-Huei Liao
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Cheng-Chung Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Cheng-Chung Jaing
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Ming-Chung Liu
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Cheng-Chung Lee.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Liao, BH., Lee, CC., Jaing, CC. et al. Optical and mechanical properties of AlF3 films produced by pulse magnetron sputtering of Al targets with CF4/O2 gas. OPT REV 16, 505–510 (2009). https://doi.org/10.1007/s10043-009-0099-z

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10043-009-0099-z

Keywords

Search

Navigation