Abstract
A novel micromachined thermal emitter for fast transient temperature operation is presented. Compared to most commercial available thermal emitters, the one here presented is able to operate in a pulsed mode. This allows the use of lock-in techniques or pyrodetectors in the data acquisition without the use of an optical chopper for light modulation. Therefore, these types of thermal emitters are very important for small filter photometers. Several hot-plate suspension concepts were studied in order to find a design with excellent mechanical stability and high thermal decoupling. In contrary to the classical spider suspension design, a novel approach based on a non-axis-symmetric design is presented. The thermal emitters are fabricated using silicon on insulator technology and KOH-etching. The emitters are heated with Pt-meanders. For temperature determination an additional Pt-structure is deposited onto the hot-plates. The emitters are mounted in TO-5 housings using a ceramic adhesive and gold wire bonding. The used operation temperature is 750°C. In pulsed operation it’s important to have a large modulation depth in terms of thermal radiation intensity in the needed spectral range. The maximal reachable modulation depth ranges from ambient temperature to steady state temperature. A modulation frequency of 5 Hz still allows using nearly the maximum modulation depth. A parameterized finite element model was realized and adapted to the measured data. This was the basis for the numerical optimization procedure for a new improved design.
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References
ANSYS (2009) www.ansys.com
axetris (2007) Ir source, data sheet. Leaflet F25/09.2003/05.06
Barrettino D, Graf M, Zimmermann M, Hagleitner C, Hierlemann A, Baltes H (2004) A smart single-chip micro-hotplate-based gas sensor system in cmos-technology. Analog Integr Circuits Signal Process 39(3):275–287
Brede M (1993) The brittle-to-ductile transition in silicon. Acta Metallurgica et Materialia 41:211–228
Briand D, Krauss A, van der Schoot B, Weimar U, Barsan N, Göpel W, de Rooij NF (2000) Design and fabrication of high-temperature micro-hotplates for drop-coated gas sensors. Sensors and Actuators B: Chem 68(1–3):223–233
Briand D, Heimgartner S, Gretillat M-A, van der Schoot B, de Rooij NF (2002) Thermal optimization of micro-hotplates that have a silicon island. J Micromech Microeng 12(6):971–978
Demarne V, Grisel A (1988) An integrated low-power thin-film co gas sensor on silicon. Sensors and Actuators 13(4):301–313
Dibbern U (1990) A substrate for thin-film gas sensors in microelectronic technology. Sensors and Actuators B: Chem 2(1):63–70
Elmi I, Zampolli S, Cozzani E, Passini M, Pizzochero G, Cardinali GC, Severi M (2007) Ultra low power mox sensors with ppb-level VOC detection capabilities. In IEEE Sensors 2007, pp 170–173
Frühauf J, Gärtner E, Jänsch E (1999) Silicon as a plastic material. J Micromech Microeng 9:305–312
Gall M (1991) The Si planar pellistor: a low-power pellistor sensor in Si thin-film technology. Sensors and Actuators B: Chem 4(3–4):533–538
Gardner JW, Pike A, De Rooij NF, Koudelka-Hep M, Clerc PA, Hierlemann A, Göpel W (1995) Integrated array sensor for detecting organic solvents. Sensors and Actuators B: Chem 26(1–3):135–139
Guidi V, Cardinali GC, Dori L, Faglia G, Ferroni M, Martinelli G, Nelli P, Sberveglieri G (1998) Thin-film gas sensor implemented on a low-power-consumption micromachined silicon structure. Sensors and Actuators B: Chem 49(1–2):88–92
Hildenbrand J, Wöllenstein J, Spiller E, Kühner G, Böttner H, Urban GA, Korvink JG (2002) Design and fabrication of a novel low-cost hotplate micro gas sensor. In Design, Test, Integration, and Packaging of MEMS/MOEMS, pp 191–199
icx photonics (2007) Broadband pulsed infrared light sources, data sheet
Intex and Laser Components (2006) Pulsed broadband infrared light source, mirl17-900, data sheet
Laser Components (2007) Cal-sourceTM infrared emitters, pulsable ir emitters: Svf-series, data sheet
optiSLang (2009) www.optislang.com
Park HS, Shin HW, Yun DH, Hong H-K, Kwon CH, Lee K, Kim S-T (1995) Tin oxide micro gas sensor for detecting CH3SH. Sensors and Actuators B: Chem 25(1–3):478–481
scitec (2007a) Series 40, thin film 1.2 and 4 watt infra-red emitters, data sheet, Issue 1.4
scitec (2007b) Series 50, thin film 0.9 watt infra-red emitter, data sheet, Issue 1.2
Simon I, Barsan N, Bauer M, Weimar U (2001) Micromachined metal oxide gas sensors: opportunities to improve sensor performance. Sensors and Actuators B: Chem 73(1):1–26
Skotheim TS, Kirpilenko GG, Dmitriev VK, Ohlckers P, Kunsch J (2008) Nanoarmophous carbon miniature thermal infrared source. In VDI-Berichte 2047
Spannhake J, Schulz O, Helwig A, Müller G, Doll T (2005) Design, development and operational concept of an advanced MEMS IR source for miniaturized gas sensor systems. In Sensor 2005. IEEE
Spannhake J, Schulz O, Helwig A, Krenkow A, Müller G, Doll T (2006) High-temperature MEMS heater platforms: long-term performance of metal and semiconductor heater materials. Sensor 6(4):405–419
Spannhake J, Helwig A, Müller G, Faglia G, Sberveglieri G, Doll T, Wassner T, Eickhoff D (2007) SnO2:Sb a new material for high-temperature mems heater applications: Performance and limitations. Sensors and Actuators B: Chem 124(2):421–428
Wöllenstein J (2003) Zur Selektivitätssteigerung von Halbleitergassensoren. PhD thesis, Universität Kassel
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This work is funded by the Fraunhofer Gesellschaft.
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Hildenbrand, J., Peter, C., Lamprecht, F. et al. Fast transient temperature operating micromachined emitter for mid-infrared optical gas sensing systems: design, fabrication, characterization and optimization. Microsyst Technol 16, 745–754 (2010). https://doi.org/10.1007/s00542-010-1049-1
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DOI: https://doi.org/10.1007/s00542-010-1049-1