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Vertically and laterally waveguide-coupled cylindrical microresonators in Si3N4 on SiO2 technology

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Abstract

High-finesse laterally and vertically waveguide-coupled cylindrical microresonators have been designed and realized in Si3N4 on SiO2 technology using conventional optical lithography. Based on the experimental results and detailed simulations, a comparison between the lateral and vertical coupling schemes is made.

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Authors and Affiliations

  1. Lightwave Devices Group, MESA+ Research Institute, University of Twente, P.O. Box 217, 7 500 AE Enschede, The Netherlands, NL

    D.J.W. Klunder, F.S. Tan, T. van der Veen, H.F. Bulthuis, G. Sengo, H.J.W.M. Hoekstra & A. Driessen

  2. Biophysical Techniques Group, MESA+ Research Institute, University of Twente, P.O. Box 217, 7 500 AE Enschede, The Netherlands, NL

    E. Krioukov & C. Otto

Authors
  1. D.J.W. Klunder
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  2. E. Krioukov
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  3. F.S. Tan
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  4. T. van der Veen
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  5. H.F. Bulthuis
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  6. G. Sengo
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  7. C. Otto
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  8. H.J.W.M. Hoekstra
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  9. A. Driessen
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Additional information

Received: 16 May 2001 / Revised version: 13 August 2001 / Published online: 2 November 2001

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Klunder, D., Krioukov, E., Tan, F. et al. Vertically and laterally waveguide-coupled cylindrical microresonators in Si3N4 on SiO2 technology. Appl Phys B 73, 603–608 (2001). https://doi.org/10.1007/s003400100705

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  • DOI: https://doi.org/10.1007/s003400100705

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