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Formation mechanisms of uniform arrays of periodic nanoparticles and nanoripples on 6H-SiC crystal surface induced by femtosecond laser ablation

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Abstract

Uniform arrays of periodic nanoparticles with 80-nm period are formed on 6H-SiC crystal irradiated by circularly polarized 400-nm femtosecond laser pulses. In order to understand the formation mechanism, the morphology evolvement as a function of laser pulse energy and number is studied. Periodic nanoripples are also formed on the sample surface irradiated by linearly polarized 400-, 510- and 800-nm femtosecond laser pulses. All these results support well the mechanism that second-harmonic generation plays an important role in the formation of periodic nanostructures.

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References

  1. T.Q. Jia, F.L. Zhao, M. Huang, H.X. Chen, J.R. Qiu, R.X. Li, Z.Z. Xu, H. Kuroda, Appl. Phys. Lett. 88, 111117 (2006)

    Article  Google Scholar 

  2. S. Kanehira, J. Si, J. Qiu, K. Fujita, K. Hirao, Nano Lett. 5, 1591 (2005)

    Article  Google Scholar 

  3. B.N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, A. Tunnermann, Appl. Phys. A 63, 109 (1996)

    ADS  Google Scholar 

  4. H. Muto, T. Asano, R.P. Wang, T. Kusumori, Appl. Phys. Lett. 87, 162106 (2006)

    Article  Google Scholar 

  5. M. Birnbaum, J. Appl. Phys. 36, 3668 (1965)

    MathSciNet  Google Scholar 

  6. W. Kautek, P. Rudolph, G. Daminelli, J. Krüger, Appl. Phys. A 81, 65 (2005)

    Article  ADS  Google Scholar 

  7. M.Y. Shen, C.H. Crouch, J.E. Carey, E. Mazur, Appl. Phys. Lett. 85, 5694 (2004)

    Article  ADS  Google Scholar 

  8. J.C. Wang, C.L. Guo, Appl. Phys. Lett. 87, 251914 (2005)

    Article  Google Scholar 

  9. G. Daninelli, J. Krüger, W. Kautek, Thin Solid Films 467, 334 (2004)

    Article  Google Scholar 

  10. J. Reif, F. Costache, M. Henyk, S.V. Pandelov, Appl. Surf. Sci. 197, 891 (2002)

    Article  Google Scholar 

  11. F. Costache, S. Kouteva-arguirova, J. Reif, Appl. Phys. A 79, 1429 (2004)

    Article  ADS  Google Scholar 

  12. A.J. Pedraza, J.D. Fowlkes, Y.-F. Guan, Appl. Phys. A 77, 277 (2003)

    ADS  Google Scholar 

  13. T.-H. Her, R.J. Finlay, C. Wu, E. Mazur, Appl. Phys. A 70, 383 (2000)

    Article  ADS  Google Scholar 

  14. F. Costache, M. Henyk, J. Reif, Appl. Surf. Sci. 486, 208 (2003)

    Google Scholar 

  15. Y. Shimotsuma, P.G. Kazansky, J.R. Qiu, K. Hirao, Phys. Rev. Lett. 91, 247405 (2003)

    Article  ADS  Google Scholar 

  16. Y. Dong, P. Molian, Appl. Phys. Lett. 84, 10 (2004)

    Article  ADS  Google Scholar 

  17. Q. Wu, Y. Ma, R. Fang, Y. Liao, Q. Yu, X. Chen, K. Wang, Appl. Phys. Lett. 82, 1703 (2003)

    Article  ADS  Google Scholar 

  18. T. Jia, H. Chen, M. Huang, F. Zhao, J. Qiu, R. Li, Z. Xu, X. He, J. Zhang, H. Kuroda, Phys. Rev. B 72, 125429 (2005)

    Article  ADS  Google Scholar 

  19. R. Wagner, J. Gottmann, A. Horn, E.W. Kreutz, Proc. SPIE 5662, 168 (2004)

    ADS  Google Scholar 

  20. J. Bonse, M. Munz, H. Sturm, J. Appl. Phys. 97, 013538 (2005)

    Article  ADS  Google Scholar 

  21. J. Bonse, S.M. Wiggins, J. Solis, J. Appl. Phys. 96, 2352 (2004)

    Article  ADS  Google Scholar 

  22. J. Bonse, M. Munz, H. Sturm, IEEE Trans. Nanotechnol. 3, 358 (2004)

    Article  Google Scholar 

  23. A. Borowiec, H.K. Haugen, Appl. Phys. Lett. 82, 4462 (2003)

    Article  ADS  Google Scholar 

  24. S. Adachi, Optical Constants of Crystalline and Amorphous Semiconductors (Kluwer, Boston, MA, 1999)

    Google Scholar 

  25. S. Nakashima, H. Haugen, T. Tomita, T. Suemoto, Phys. Rev. B 62, 16605 (2000)

    Article  ADS  Google Scholar 

  26. A. Shih, S. Lee, C. Chia, Appl. Phys. Lett. 74, 3347 (1999)

    Article  ADS  Google Scholar 

  27. T. Jia, Z. Xu, X. Li, R. Li, B. Shuai, F. Zhao, Appl. Phys. Lett. 82, 4382 (2003)

    Article  ADS  Google Scholar 

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Authors and Affiliations

  1. State Key Laboratory of Optoelectronic Materials and Technologies, Zhongshan (Sun Yat-sen) University, Guangzhou, 510275, P.R. China

    X.J. Wu, T.Q. Jia, F.L. Zhao, M. Huang & N.S. Xu

  2. The Institute for Solid State Physics, University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba, 277-8581, Japan

    T.Q. Jia & H. Kuroda

  3. State Key Laboratory of High Field Laser Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Science, Shanghai, 201800, P.R. China

    Z.Z. Xu

Authors
  1. X.J. Wu
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  2. T.Q. Jia
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  3. F.L. Zhao
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  4. M. Huang
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  5. N.S. Xu
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  6. H. Kuroda
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  7. Z.Z. Xu
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Corresponding author

Correspondence to F.L. Zhao.

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PACS

79.20.Ds; 42.62.Cf; 61.80.Ba; 81.05.Cy; 78.30.Am

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Wu, X., Jia, T., Zhao, F. et al. Formation mechanisms of uniform arrays of periodic nanoparticles and nanoripples on 6H-SiC crystal surface induced by femtosecond laser ablation. Appl. Phys. A 86, 491–495 (2007). https://doi.org/10.1007/s00339-006-3797-4

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  • DOI: https://doi.org/10.1007/s00339-006-3797-4

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