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Top-gathering pillar array of hybrid organic–inorganic material by means of self-organization

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Abstract

Two-dimensional (2D) pillar arrays with submicrometer to micrometer repetitions have been fabricated from hybrid organic–inorganic material by mask lithography or multi-beam interference lithography. The type of array structure depends on structural parameters such as the pillar height, diameter and distance between neighboring pillars. Two kinds of periodic arrays, 2D arrays and ‘top-gathering’ arrays, can be obtained by controlling the structural parameters. In the top-gathering arrays, the pillars are gathered at the top by means of self-organization, and ‘top-gathering’ units composed of four pillars can be formed.

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Authors and Affiliations

  1. Tokyo Institute of Technology, 2-12-1 O-okayama, Meguro-ku, Tokyo, 152-8550, Japan

    H. Segawa, S. Yamaguchi, Y. Yamazaki, T. Yano & S. Shibata

  2. PRESTO-JST, Japan Science and Technology Corporation (JST), Kawaguchi Center Building, 12F 1-8, Honcho 4-chome, Kawaguchi, Saitama-ken, Japan

    H. Segawa

  3. CREST-JST, Hokkaido University, N21W10, Sapporo, 001-0021, Japan

    H. Misawa

Authors
  1. H. Segawa
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  2. S. Yamaguchi
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  3. Y. Yamazaki
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  4. T. Yano
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  5. S. Shibata
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  6. H. Misawa
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Correspondence to H. Segawa.

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PACS

68.35.Gy; 81.20.Fw; 82.50.-m

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Segawa, H., Yamaguchi, S., Yamazaki, Y. et al. Top-gathering pillar array of hybrid organic–inorganic material by means of self-organization. Appl. Phys. A 83, 447–451 (2006). https://doi.org/10.1007/s00339-006-3568-2

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  • DOI: https://doi.org/10.1007/s00339-006-3568-2

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