Skip to main content
SpringerLink
Log in

Particle on surface: 3D-effects in dry laser cleaning

  • Published:
Applied Physics A Aims and scope Submit manuscript

An Erratum to this article was published on 01 November 2005

Abstract

Previous analysis of dry laser cleaning within the frame of a one-dimensional (1D) model with homogeneous surface heating shows that this model disagrees with experiments by one–two orders of magnitude. The particle on the surface produces an inhomogeneous intensity distribution in its vicinity due to scattering and diffraction. This produces a nonstationary 3D distribution of the temperature and nonstationary 3D thermal deformations of the surface. If one uses the Mie theory for calculation of inhomogeneous intensity then in some region of the parameters, the 3D model predicts results close to the experimental ones. The next step was done when the scattering effects for radiation reflected from the surface was taken into account (so-called “particle on surface” problem). This approach yields results close to the experimental one within the wide range of parameters.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. D. Bäuerle: Laser Processing and Chemistry, 3rd edn. (Springer Verlag, Berlin 2000)

  2. B.S. Luk’yanchuk (Ed.): Laser Cleaning (Word Scientific, New Jersey, London 2002)

  3. J.D. Kelley, F.E. Hovis: Microelectron. Eng. 20, 159 (1993)

    Article  MathSciNet  Google Scholar 

  4. Y.F. Lu, W.D. Song, B.W. Ang, M.H. Hong, S.S.H. Chan, T.S. Low: Appl. Phys. A 65, 9 (1997)

    Article  ADS  Google Scholar 

  5. Y.F. L, Y.W. Zheng, W.D. Song: J. Appl. Phys. 87, 1534 (2000)

    Article  ADS  Google Scholar 

  6. N. Arnold, G. Schrems, T. Mühlberger, M. Bertsch, M. Mosbacher, P. Leiderer, D. Bäuerle: Proc. SPIE 4426, 340 (2002)

    Article  ADS  Google Scholar 

  7. N. Arnold: In Ref. [2], Chapt. 2, pp. 51–102

  8. B.S. Luk’yanchuk, Y.W. Zheng, Y.F. Lu: Proc. SPIE 4065, 576 (2000)

    Article  ADS  Google Scholar 

  9. B.S. Luk’yanchuk, Y.W. Zheng, Y.F. Lu: Proc. SPIE 4423, 115 (2001)

    Article  ADS  Google Scholar 

  10. B.S. Luk’yanchuk, Y.W. Zheng, Y.F. Lu: RIKEN Rev. 43, 28 (2002)

    Google Scholar 

  11. B.S. Luk’yanchuk, M. Mosbacher, Y.W. Zheng, H.-J. Münzer, S.M. Huang, M. Bertsch, W.D. Song, Z.B. Wang, Y.F. Lu, O. Dubbers, J. Boneberg, P. Leiderer, M.H. Hong, T.C. Chong: In Ref. [2], Chapt. 3, pp. 103–178

  12. B.S. Luk’yanchuk, S.M. Huang, M.H. Hong: Proc. SPIE 4760, 204 (2002)

    Article  ADS  Google Scholar 

  13. B.S. Luk’yanchuk, N. Arnold, S.M. Huang, Z.B. Wang, M.H. Hong: Appl. Phys. A 77, 209 (2003)

    ADS  Google Scholar 

  14. N. Arnold, G. Schrems, D. Bäuerle: Ablative threshold in laser cleaning of particles, Abstract of 7th Int. Conf. on Laser Ablation, COLA 03 (Crete, Greece 2002)

  15. H.-J. Münzer, M. Mosbacher, M. Bertsch, O. Dubbers, F. Burnmeister, A. Park, R. Wannemather, B.-U. Runge, D. Bäuerle, J. Boneberg, P. Leiderer: Proc. SPIE 4426, 180 (2002)

    Article  Google Scholar 

  16. P.A. Bobbert, J. Vlieger: Physica A 137, 209 (1986)

    Article  ADS  Google Scholar 

  17. N. Arnold: Appl. Surf. Sci. 208–209, 15 (2003)

  18. W. Zalowich: Phys. Rev. E, 64, 066610 (2001)

    Article  ADS  Google Scholar 

  19. M.V. Berry, C. Upstill: In Progress in optics, Vol. 18, ed. by E. Wolf, (Elsevier, North-Holland 1980)

  20. M. Born, E. Wolf: Principles of Optics, 7th edn. (Cambridge University Press, 1999)

  21. T.R.M. Sales: Phys. Rev. Lett. 81, 3844 (1998)

    Article  ADS  Google Scholar 

  22. J.F. Nye: J. Opt. A: Pure Appl. Opt. 5, 495 (2003)

    Article  ADS  MathSciNet  Google Scholar 

  23. T. Miyamoto: Nonlinear Anal. 54, 755 (2003)

    Article  MathSciNet  Google Scholar 

  24. Yu.A. Kravtsov, Yu.I. Orlov: Geometrical Optics of Inhomogeneous Media (Springer, Berlin 1990)

  25. G. Schrems, M.P. Delamare, N. Arnold, P. Leiderer, D. Bäuerle: Appl. Phys. A 76, 847 (2003)

    Article  ADS  Google Scholar 

  26. D. Bedeaux, J. Vlieger: Optical Properties of Surface (Imperial College Press, London 2002)

Download references

Author information

Authors and Affiliations

  1. Data Storage Institute, Agency for Science, Technology and Research, Singapore, 117608, Singapore

    B.S. Luk’Yanchuk, Z.B. Wang, W.D. Song & M.H. Hong

Authors
  1. B.S. Luk’Yanchuk
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Z.B. Wang
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. W.D. Song
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. M.H. Hong
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to B.S. Luk’Yanchuk.

Additional information

PACS

42.25.Fx; 42.25.Hz; 81.65.Cf

An erratum to this article can be found at http://dx.doi.org/10.1007/s00339-005-3296-z.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Luk’Yanchuk, B., Wang, Z., Song, W. et al. Particle on surface: 3D-effects in dry laser cleaning. Appl. Phys. A 79, 747–751 (2004). https://doi.org/10.1007/s00339-004-2567-4

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00339-004-2567-4

Keywords

Search

Navigation