Abstract
We report on the femtosecond laser fabrication of micro-channels of sub-micrometer cross section recorded in polymethylmethacrylate (PMMA) films in a single processing step. Both axial lengths of an elliptical cross section smaller than 0.4 μm were achieved for a fabrication irradiance close to the dielectric breakdown of PMMA. Femtosecond pulsed irradiation was scanned along the three-dimensional (3D) patterns inside the film. Channels have a self-formed densified cladding and can be 3D stacked into any pre-designed pattern and can extend over a mm length. These features are prospective for micro-total analysis system (μ-TAS) chip fabrication, micro- or nano-fluidic studies, and photonic applications such as photonic crystals .
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E.N. Glezer, M. Milosavljevic, L. Huang, R.J. Finlay, T.-H. Her, J.P. Callan, E. Mazur: Opt. Lett. 21, 2023 (1996)
Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, Y. Jiang: Opt. Lett. 26, 1912 (2001)
A. Marcinkevicius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, J. Nishii: Opt. Lett. 26, 277 (2001)
K. Ueno, F. Kitagawa, H.-B. Kim, T. Tokunaga, S. Matsuo, H. Misawa, N. Kitamura: Chem. Lett. 2000, 858 (2000)
K. Yamasaki, M. Watanabe, S. Juodkazis, S. Matsuo, H. Misawa: In 49th Spring Meet. Jpn. Soc. Appl. Phys. Relat. Soc. 2002, p. 1119
K. Yamasaki, S. Juodkazis, T. Lippert, M. Watanabe, S. Matsuo, H. Misawa: Appl. Phys. A 76, 325 (2003)
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42.70.-a; 42.70.Jk; 81.16.-c; 81.40.-z; 82.35.Lr
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Yamasaki , K., Juodkazis , S., Matsuo , S. et al. Three-dimensional micro-channels in polymers: one-step fabrication. Appl Phys A 77, 371–373 (2003). https://doi.org/10.1007/s00339-003-2191-8
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DOI: https://doi.org/10.1007/s00339-003-2191-8