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Planar ZrO2 waveguides prepared by the sol-gel process: Structural and optical properties

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Abstract

ZrO2 waveguides are prepared by the sol-gel process from a solution containing zirconiumn-propoxide and acetylacetone in propanol-2. Structural characterizations are investigated for different annealing temperatures using suitable techniques including Waveguide Raman Spectroscopy, Electron Microscopy and Atomic Force Microscopy. Films are amorphous at 300°C and the pure ZrO2 tetragonal crystalline phase appears beyond 400°C. Crystallized films present a dense, uniform and polycrystalline structure made up by randomly oriented nanocrystallites, the diameter of which increases from 38 Å at 400°C to 53 Å at 600°C. Waveguides are at least monomode TE0 at 632.8 nm. At this wavelength, optical losses are about, 0.8±0.2dB/cm for amorphous layers and increase up to 2.5±0.4 dB/cm for 600°C heat-treated waveguides.

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Authors and Affiliations

  1. Département de Physique des Matériaux (URA 172), Université Claude Bernard, Lyon I, 43 bld du 11 novembre 1918, 69622, Villeurbanne Cedex, France

    C. Urlacher, J. Dumas & J. Serughetti

  2. Laboratoire de Physico-Chimie des Matériaux Luminescents (URA 442), Université Claude Bernard, Lyon I, 43 bld du 11 novembre 1918, 69622, Villeurbanne Cedex, France

    J. Mugnier

  3. IBCP-CNRS (UPR 412), 7 passage du Vercors, 69367, Lyon, France

    M. Munoz

Authors
  1. C. Urlacher
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  2. J. Dumas
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  3. J. Serughetti
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  4. J. Mugnier
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  5. M. Munoz
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Urlacher, C., Dumas, J., Serughetti, J. et al. Planar ZrO2 waveguides prepared by the sol-gel process: Structural and optical properties. J Sol-Gel Sci Technol 8, 999–1005 (1997). https://doi.org/10.1007/BF02436974

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  • DOI: https://doi.org/10.1007/BF02436974

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