Time-dependent properties of organic thin films deposited by glow discharge

Abstract

Sample capacitors were constructed with dielectrics obtained from completely fluorinated carbons which were polymerized in a plasma glow discharge. The rate of degradation of the capacitor properties depends on the size of the monomer molecule selected, the discharge frequency used during the deposition of the film, the vacuum anneal immediately after deposition, the temperature, the applied electric field, and the air or vacuum environment during life tests. The diversity of the results is explained by plasma acitvation of the carbon-carbon bond in the monomers and the formation of the films from the radicals thus produced.