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A Laboratory CVD Reactor for the Synthesis of Vertically Oriented Carbon Nanotube Arrays

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Abstract

The functional structure and the design of a CVD reactor for the synthesis of vertically oriented carbon nanotube (VOCNT) arrays on silicon substrates are described. To synthesize VOCNTs, various organic compounds, viz., toluene, cyclohexane, and acetonitrile, and their mixtures in the liquid state were tested under normal conditions.

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Authors and Affiliations

  1. Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630090, Russia

    A. V. Gusel’nikov, A. G. Kurenya, V. E. Arkhipov & A. V. Okotrub

  2. Institute of Computational Technologies, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630090, Russia

    A. V. Safronov, S. G. Bolgarin, A. E. Ivanov & A. G. Kvashnin

  3. Novosibirsk State University, Novosibirsk, 630090, Russia

    A. G. Kvashnin & A. V. Okotrub

  4. OOO Karsi, Novosibirsk, 630055, Russia

    A. V. Okotrub

Authors
  1. A. V. Gusel’nikov
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  2. A. V. Safronov
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  3. A. G. Kurenya
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  4. V. E. Arkhipov
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  5. S. G. Bolgarin
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  6. A. E. Ivanov
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  7. A. G. Kvashnin
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  8. A. V. Okotrub
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Corresponding author

Correspondence to A. G. Kvashnin.

Additional information

Original Russian Text © A.V. Gusel’nikov, A.V. Safronov, A.G. Kurenya, V.E. Arkhipov, S.G. Bolgarin, A.E. Ivanov, A.G. Kvashnin, A.V. Okotrub, 2018, published in Pribory i Tekhnika Eksperimenta, 2018, No. 4, pp. 20–54.

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Gusel’nikov, A.V., Safronov, A.V., Kurenya, A.G. et al. A Laboratory CVD Reactor for the Synthesis of Vertically Oriented Carbon Nanotube Arrays. Instrum Exp Tech 61, 604–609 (2018). https://doi.org/10.1134/S002044121804019X

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  • DOI: https://doi.org/10.1134/S002044121804019X

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