Abstract
The chemical composition and tribological properties of the thin-film diselenide molybdenum coatings deposited by pulsed laser deposition in vacuum and a rarefied inert gas (argon) atmosphere are studied. Upon deposition in a gas at a pressure of ∼2 Pa, stoichiometric coatings with improved antifriction properties as compared vacuum-deposited coatings form. However, a too strong increase in the argon pressure (to ∼10 Pa) degrades the tribological properties of the coating. Structure formation in the MoSe x coatings grown by pulsed laser deposition on an unheated substrate is investigated. Deposition in vacuum or argon at a pressure of 2 Pa leads to formation of rather smooth coatings with a dense amorphous structure containing molybdenum nanoinclusions. Deposition at a high argon pressure results in a developed surface relief and a loose coating structure. A mathematical model is developed using the kinetic Monte Carlo method in order to describe structure formation in the coatings that grow during physical deposition of an atomic flux. A comparative analysis demonstrates satisfactory agreement between the simulated and experimentally studied structures in the coatings created by pulsed laser deposition at various gas pressures.
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Original Russian Text © V.N. Nevolin, V.Yu. Fominski, A.G. Gnedovets, R.I. Romanov, 2009, published in Zhurnal Tekhnicheskoĭ Fiziki, 2009, Vol. 79, No. 1, pp. 118–124.
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Nevolin, V.N., Fominski, V.Y., Gnedovets, A.G. et al. Study and simulation of the growth of solid lubricant MoSe x coatings during pulsed laser deposition. Tech. Phys. 54, 117–123 (2009). https://doi.org/10.1134/S1063784209010174
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DOI: https://doi.org/10.1134/S1063784209010174