Skip to main content
SpringerLink
Log in

Preferred orientations of NiO thin films prepared by RF magnetron sputtering

  • Published:
Journal of Materials Science Aims and scope Submit manuscript

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

References

  1. E. Fujii, A. Tomozawa, H. Torii and R. Takayama Jpn. J. Appl. Phys. 35 (1996) L328.

    Google Scholar 

  2. H. Sato, T. Minami, S. Takata and T. Yamada Thin Solid Films 236 (1993) 27.

    Google Scholar 

  3. S. Yamada, T. Yoshioka, M. Miyashita, K. Urabe and M. Kitao J. Appl. Phys. 63 (1988) 2116.

    Google Scholar 

  4. K. Yoshimura, T. Miki and S. Tanemura Jpn. J. Appl. Phys. 34 (1995) 2440.

    Google Scholar 

  5. H. Kumagai, M. Matsumoto, K. Toyoda and M. Obara J. Mater. Sci. Lett. 15 (1996) 1081.

    Google Scholar 

  6. A. B. Berzin, C. W. Yuan and A. L. De Lozanne Appl. Phys. Lett. 57 (1990) 90.

    Google Scholar 

  7. P. Lunkenheimer, A. Loidl, C. R. Ottermann and K. Bange Phys. Rev. B 44 (1991) 5927.

    Google Scholar 

  8. E. Fujii, A. Tomazawa, S. Fujii, H. Torii, M. Hattori and R. Takayama Jpn. J. Appl. Phys. 32 (1993) L1448.

    Google Scholar 

  9. A. J. Varkey and A. F. Fort Thin Solid Films 235 (1993) 47.

    Google Scholar 

  10. H. F. Winters and P. Sigmund J. Appl. Phys. 45 (1974) 4760.

    Google Scholar 

  11. D. R. James, “Optical Thin Films” (SPIE, Washington, 1987) p. 28.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Research Institute of Energy Resources Technology, Chosun University, Gwangju, 501-759, Korea

    H. W. Ryu & G. P. Choi

  2. Department of Electrical Engineering and Department of Advanced Materials Engineering, Chosun University, Gwangju, 501-759, Korea

    W. S. Lee & J. S. Park

Authors
  1. H. W. Ryu
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. G. P. Choi
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. W. S. Lee
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. J. S. Park
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Ryu, H.W., Choi, G.P., Lee, W.S. et al. Preferred orientations of NiO thin films prepared by RF magnetron sputtering. Journal of Materials Science 39, 4375–4377 (2004). https://doi.org/10.1023/B:JMSC.0000033431.52659.e5

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1023/B:JMSC.0000033431.52659.e5

Keywords

Search

Navigation